浸渍阴极的真空预处理技术*

doi:10.13385/j.cnki.vacuum.2022.01.10

真空 ›› 2022, Vol. 59 ›› Issue (1): 54-58.doi: 10.13385/j.cnki.vacuum.2022.01.10

浸渍阴极的真空预处理技术^*

刘燕文¹, 孟鸣凤¹, 陆玉新², 朱虹¹, 王国建^1,3, 赵恒邦¹, 王小霞¹, 张志强¹

1.中国科学院空天信息创新研究院北京 100190;
2.天津交通职业学院天津 300110;
3.中国科学院大学北京 100049

收稿日期:2021-03-15 出版日期:2022-01-25 发布日期:2022-01-27
作者简介:刘燕文（1964-）,男,天津市人,博士。
基金资助:
*总装预研基金项目（31512010404-1）、国家自然科学基金项目（61771454）

Pretreatment of the Impregnated Cathode

LIU Yan-wen¹, MENG Ming-feng¹, LU Yu-xin², ZHU Hong¹, WANG Guo-jian^1,3, ZHAO Heng-bang¹, WANG Xiao-xia¹, ZHANG Zhi-qiang¹

1. Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China;
2. Tianjin Traffic Vocational Institute, Tianjin 300110, China;
3. University of the Chinese Academy of Sciences, Beijing 100049, China

Received:2021-03-15 Online:2022-01-25 Published:2022-01-27

摘要/Abstract

摘要： 本文总结了用于真空微波电子器件的浸渍阴极的蒸发规律,通过分析提出了浸渍阴极预处理工艺,建立了超高真空装置。在超高真空环境下,将浸渍阴极灯丝加热,使阴极温度升高到1100~1200℃,保持1~200h（温度和时间依不同微波管型而定）。预处理工艺解决了浸渍阴极发射与蒸发的矛盾,现已建立数十台、几十个工位的浸渍阴极预处理设备,大大提高了微波真空电子器件中电子枪的绝缘性能,减小了栅发射。浸渍阴极预处理工艺还可以加速检验热子的可靠性,从而避免微波器件在使用过程中才发现热子短路、热子缺陷及热子焊接点不牢等因素造成热子断路的问题,提高了微波真空电子器件中热子的可靠性。

关键词: 真空微波电子器件, 浸渍阴极, 真空蒸发, 阴极预处理

Abstract: The evaporation law of impregnated cathode for microwave vacuum electronic devices is summarized, and a pretreatment method of impregnated cathode is proposed. In the ultra-high vacuum, the cathode in the electron gun is heated. When the temperature rises to 1100~1200℃,and maintains for 1~200h(the temperature and time depend on different microwave tubes). This technology solves the contradiction between cathode emission and evaporation in the electron gun. More than a dozen impregnated cathode pretreatment equipments have been developed, which improves the insulation performance of the electron gun in microwave vacuum electronic devices and reduces the grid emission. At the same time, this technology can speed up the inspection of the reliability of the protons, thereby avoiding the problem of thermon disconnection caused by the defects of the heaters during the use of microwave devices, and improving the reliability of the heater in microwave vacuum electronic devices.

Key words: microwave vacuum electronics, impregnated cathode, evaporation, cathode pretreatment

中图分类号:

TN107

刘燕文, 孟鸣凤, 陆玉新, 朱虹, 王国建, 赵恒邦, 王小霞, 张志强. 浸渍阴极的真空预处理技术^*[J]. 真空, 2022, 59(1): 54-58.

LIU Yan-wen, MENG Ming-feng, LU Yu-xin, ZHU Hong, WANG Guo-jian, ZHAO Heng-bang, WANG Xiao-xia, ZHANG Zhi-qiang. Pretreatment of the Impregnated Cathode[J]. VACUUM, 2022, 59(1): 54-58.

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浸渍阴极的真空预处理技术^*

Pretreatment of the Impregnated Cathode

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