真空电弧源冷却结构对温度场的影响研究*

doi:10.13385/j.cnki.vacuum.2022.06.05

真空 ›› 2022, Vol. 59 ›› Issue (6): 29-33.doi: 10.13385/j.cnki.vacuum.2022.06.05

真空电弧源冷却结构对温度场的影响研究^*

刘兴龙^1,2, 沈佩^1,3, 王光文¹, 岳向吉¹, 蔺增^1,4

1.东北大学机械工程与自动化学院,辽宁沈阳 110819;
2.沈阳添和毅科技有限责任公司,辽宁沈阳 110027;
3.泰安东大新材表面技术有限公司,山东泰安 271024;
4.辽宁省植入器械与界面科学重点实验室,辽宁沈阳 110819

收稿日期:2022-01-11 出版日期:2022-11-25 发布日期:2022-12-05
通讯作者: 蔺增,教授。
作者简介:刘兴龙（1990-）,男,山东省临朐人,博士。
基金资助:
^*中央高校基本科研业务费交叉融合项目（N2003009）

Influence of Cooling Structure on Vacuum Arc Source Temperature

LIU Xing-long^1,2, SHEN Pei^1,3, WANG Guang-wen¹, YUE Xiang-ji¹, LIN Zeng^1,4

1. School of Mechanical Engineering & Automation, Northeastern University, Shenyang 110819, China;
2. Surfacility (Shenyang) Technology Limited, Shenyang 110027, China;
3. NeuMat (Taian) Surface Technology Limited, Taian 271024, China;
4. Key Laboratory of Implant Device and Interface Science of Liaoning Province, Shenyang 110819, China

Received:2022-01-11 Online:2022-11-25 Published:2022-12-05

摘要/Abstract

摘要： 真空电弧离子镀技术是工业界使用最为广泛的表面处理技术之一。在电弧离子镀实际应用过程中,所制备涂层的表面大颗粒仍然是困扰高端制造的一大难题,造成这一现象的根本原因是靶材表面局部过热产生的液滴飞溅。减少液滴产生的有效方法有很多,除降低放电功率密度、提高弧斑运动速度等热端控制技术之外,还包括加强靶材的冷却等。本文将新型冷却结构和弧斑运动引入弧源的数值模型,对弧源内部冷却水的流场和靶材表面的温度场进行模拟分析,研究了不同边界条件下弧源温度场的变化规律。本文的研究结果对真空镀膜机设计与工艺开发具有一定的指导作用。

关键词: 弧源, 冷却结构, 温度场, 靶面温度

Abstract: Vacuum arc ion plating is one of the most extensive surface treatment technologies in use now. However, in the actual industrial application, large surface particle of the prepared coating is still a major problem that plagues the advanced manufacturing. The reason lies on that the target is overheated, and then molten pool is formed to cause solution splash. The effective methods for reducing the occurrence of droplets include reducing the discharge power density, increasing the arc motion speed, as well as enhancing the cooling measures. In this paper, a numerical model was established for the arc source including new cooling structure and arc spot motion. The flow field of the cooling water inside the arc source and the temperature field of the arc source surface were simulated and analyzed, and the variation of the arc source under different boundary conditions was analyzed. The results in this paper may be helpful for the design of vacuum coating machine as well as the process development.

Key words: arc source, cooling structure, temperature field, target surface temperature

中图分类号:

TB43

刘兴龙, 沈佩, 王光文, 岳向吉, 蔺增. 真空电弧源冷却结构对温度场的影响研究^*[J]. 真空, 2022, 59(6): 29-33.

LIU Xing-long, SHEN Pei, WANG Guang-wen, YUE Xiang-ji, LIN Zeng. Influence of Cooling Structure on Vacuum Arc Source Temperature[J]. VACUUM, 2022, 59(6): 29-33.

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真空电弧源冷却结构对温度场的影响研究^*

Influence of Cooling Structure on Vacuum Arc Source Temperature

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