超高水氧阻隔膜研究进展*

doi:10.13385/j.cnki.vacuum.2023.01.04

摘要/Abstract

摘要： 在柔性电子领域,如有机薄膜太阳能电池、OLED显示、量子点显示等封装时都需要对水氧具有超高阻隔性的薄膜。针对超高水氧阻隔膜制备工艺现状,为提高阻隔膜性能指标,满足快速发展的柔性电子封装技术需求,本文分析了基底材料对水氧阻隔膜性能指标的影响,综述了超高阻隔膜叠层制备技术,为开展超高阻隔膜研究与产业开发提供依据,并对后续技术发展进行了展望。

关键词: 柔性基底, 高阻隔膜, 柔性电子, 单层阻隔膜, 多层阻隔膜

Abstract: The ultra high vapor and oxygen barrier film, which can protect the organic electronic device from water vapor erosion and prolong lifetime, is widely used in flexible electronics, such as organic thin film solar cells, OLED displays, quantum dot displays and other electronic packaging. According to the research status of the preparation technology of high barrier film, in order to improve the performance and meet the demand of rapid development of flexible electronic packaging, the effect of substrate material is analyzed, the multilayer preparation technology is summarized. Finally, the future development trend of barrier film technology is prospected.

Key words: flexible substrate, high barrier film, flexible electronics, single layer barrier film, multilayer barrier film

中图分类号:

TB43

秦丽丽, 董茂进, 冯煜东, 韩仙虎, 蔡宇宏, 王毅, 李小金, 马凤英. 超高水氧阻隔膜研究进展^*[J]. 真空, 2023, 60(1): 23-29.

QIN Li-li, DONG Mao-jin, FENG Yu-dong, HAN Xian-hu, CAI Yu-hong, WANG Yi, LI Xiao-jin, MA Feng-ying. Recent Research Progress of Ultra High Vapor and Oxygen Barrier Film[J]. VACUUM, 2023, 60(1): 23-29.

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