等离子增强磁控溅射制备TiCr基纳米复合涂层的耐冲蚀耐腐蚀性能

doi:10.13385/j.cnki.vacuum.2023.05.04

真空 ›› 2023, Vol. 60 ›› Issue (5): 37-41.doi: 10.13385/j.cnki.vacuum.2023.05.04

等离子增强磁控溅射制备TiCr基纳米复合涂层的耐冲蚀耐腐蚀性能

李灿民¹, 张心凤¹, 魏荣华²

1.安徽纯源镀膜科技有限公司,安徽合肥 230088;
2.美国西南研究院,德克萨斯州圣安东尼奥 78238

收稿日期:2023-01-15 出版日期:2023-09-25 发布日期:2023-09-26
作者简介:李灿民（1985-）,男,江西九江人,硕士。

The Anti-erosion (corrosion) Properties of TiCr-based Nanocomposite Coatings by Plasma Enhanced Magnetron Sputtering

LI Can-min¹, ZHANG Xin-feng¹, WEI Rong-hua²

1. Anhui Chunyuan Coating Technology Co., Ltd., Hefei 230088, China;
2. Southwest Research Institute, San Antonio 78238, USA

Received:2023-01-15 Online:2023-09-25 Published:2023-09-26

摘要/Abstract

摘要： 使用等离子增强磁控溅射（PEMS）技术在H13热作模具钢表面制备了TiCrSiCN和TiCrSiCON两种纳米复合涂层。通过Rc压痕法、纳米压痕法、微型喷砂装置和恒电位仪分别测定了涂层与基体的结合力及其韧性、耐冲蚀和耐腐蚀性能,讨论了氧元素的加入对涂层性能的影响。结果表明：TiCrSiCN和TiCrSiCON纳米复合涂层均与基体结合良好;TiCr基纳米复合涂层耐冲蚀磨损性能是H13钢的4~5倍,TiCrSiCON具有比TiCrSiCN更好的耐冲蚀性能;TiCrSiCN、TiCrSiCON、H13钢的极化电阻依次降低;氧元素有利于提高TiCr基涂层与基体的结合力,但会降低涂层的韧性和耐腐蚀性能。

关键词: 等离子增强磁控溅射, TiCr基纳米复合涂层, 结合力, 韧性, 耐冲蚀磨损, 耐腐蚀

Abstract: Plasma enhanced magnetron sputtering was used to prepare TiCrSiCN and TiCrSiCON nanocomposite coatings on H13 hot working mould steel. Rc indentation method, nanoindentation method, micro-bead blaster, potentiostat were used to detect the adhesion force, toughness, erosion and corrosion resistance of the coatings, respectively. The influences of oxygen addition on the properties of the coatings were emphatically discussed. The results show that the TiCrSiCN and TiCrSiCON nanocomposite coatings have good adhesion to the substrate. The TiCr based nanocomposite coatings could improve the erosion and wear resistance over the uncoated H13 steel by 4~5 times, and the TiCrSiCON coating has better erosion resistance than TiCrSiCN coating. The polarization resistance of TiCrSiCN, TiCrSiCON, and H13 steel decreases sequentially. Oxygen addition is beneficial for improving the adhesion between TiCr based coatings and the substrate, but it will reduce the toughness and the corrosion resistance of the coating.

Key words: PEMS, TiCr based nanocomposite coating, adhesion, toughness, erosion resistance, corrosion resistance

中图分类号: TB331;TB43

李灿民, 张心凤, 魏荣华. 等离子增强磁控溅射制备TiCr基纳米复合涂层的耐冲蚀耐腐蚀性能[J]. 真空, 2023, 60(5): 37-41.

LI Can-min, ZHANG Xin-feng, WEI Rong-hua. The Anti-erosion (corrosion) Properties of TiCr-based Nanocomposite Coatings by Plasma Enhanced Magnetron Sputtering[J]. VACUUM, 2023, 60(5): 37-41.

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等离子增强磁控溅射制备TiCr基纳米复合涂层的耐冲蚀耐腐蚀性能

The Anti-erosion (corrosion) Properties of TiCr-based Nanocomposite Coatings by Plasma Enhanced Magnetron Sputtering

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