真空 ›› 2023, Vol. 60 ›› Issue (6): 42-46.doi: 10.13385/j.cnki.vacuum.2023.06.07
吴小虎1, 呼书杰1, 孙恩泽1, 张鑫2, 赵琦3
WU Xiao-hu1, HU Shu-jie1, SUN En-ze1, ZHANG Xin2, ZHAO Qi3
摘要: 大空间建筑既是城市景观的重要组成元素,又是展现城市特色、彰显时代风貌、传承城市历史的重要载体。氟化非晶碳薄膜有望作为外立面修饰材料,提升大空间建筑的自清洁、防雾和抗冰能力。本文介绍了氟化非晶碳薄膜的射频/直流共溅射方法,系统分析了薄膜微观形貌、粗糙度和化学组分随溅射功率比的变化规律,详细研究了化学组分和微观形貌对薄膜浸润性能的影响。结果表明:氟化非晶碳薄膜以岛状模式生长,当石墨/聚四氟乙烯溅射功率比从0升高至1.25时,含氟组分种类和含量的减少是薄膜亲水性增强的主要原因。
中图分类号: O484;TN147
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