欢迎访问沈阳真空杂志社 Email Alert    RSS服务

VACUUM ›› 2022, Vol. 59 ›› Issue (1): 29-32.doi: 10.13385/j.cnki.vacuum.2022.01.06

Previous Articles     Next Articles

Study on the Properties of Large-area ZnO Thin Films Fabricated by Magnetron Sputtering Deposition

LIU Yuan-dong   

  1. Beijing Institute Of Electronic Information,Beijing 100009,China
  • Received:2020-10-09 Online:2022-01-25 Published:2022-01-27

Abstract: ZnO thin films were deposited on glass substrate by magnetron sputtering ZnO ceramic targets. The phase structure, band gap, transmittance and microstructure of the films were investigated by X-ray diffraction,scanning electron microscope and multifunctional film tester. The results show that the ZnO films with（002）preferred orientation can be formed under different process parameters. The process parameters affect the transmittance of the films. The coverage of films is determined by the sputtering power.

Key words: magnetron sputtering, ZnO films, process parameters, transmittance

CLC Number: 

  • TB43
[1] EISELE W, ENNAOUI A, BISCHOFF P S, et al.XPS, TEM and NRA investigations of Zn(Se, OH)/Zn(OH)2 films on Cu(In, Ga)(S, Se)2 substrates for highly efficient solar cells[J]. Solar Energy Materials andSolar Cells, 2003, 75: 17-26.
[2] MA J, JI F, ZHANG D H, et al.Optical and electronic properties of transparent conducting ZnO and ZnO: Al films prepared by evaporating method[J]. Thin Solid Films, 1999
357(2): 98-101.
[3] ISLAM M N, GHOSH T B, CHOPRA K L, et al.XPS and X-ray diffraction studies of aluminum-doped zinc oxide transparent conducting films[J]. Thin Solid Films, 1996,280: 20-25.
[4] WANG Z A, CHU J B, ZHU H B, et al.Growth of ZnO: Al films by RF sputtering at room temperature for solar cell applications[J]. Solid-State Electronics, 2009, 53(11): 1149-1153.
[5] STUDENIKIN S A, GOLEGO N, COCIVERA M, Carrier mobility and density contributions to photoconductivity transients in polycrystalline ZnO films[J]. Journal of Applied Physics, 2000, 87: 2413-2421.
[6] AJURIA J, ETXEBARRIA I, CAMBARAU W, et al.Inverted ITO-free organic solar cells based on p and n semiconductingoxides. New designs for integration in tandem cells, top or bottom detecting devices, and photovoltaic windows[J]. Energy Environ. Sci, 2010, 4: 453-458.
[7] SAITO M, FUJIHARA S.Large photocurrent generation in dye-sensitized ZnO solarcells[J]. Energy Environ. Sci, 2008, 1(2): 280-283.
[8] 孙柏. PLD 技术制备ZnO薄膜及其结构和发光性质研究[D]. 合肥: 中国科学技术大学, 2007.
[9] KWON T H, PARK S H, RYU J Y, et al.Zinc oxide thin film doped with Al2O3, TiO2 and V2O5 as sensitive sensor for trimethylamine gas[J]. Sensors and Actuators B, 1998, 46(2): 75-79.
[10] KRAMER I J, SARGENT E H.Colloidal quantum dot photovoltaics: A path Forward[J]. ACS Nano, 2011, 5(11): 8506-8514.
[11] 梁广兴, 范平, 张东平, 等. 工艺参数对离子束溅射ZnO: A1薄膜结构与性能的影响[J]. 真空科学与技术学报, 2010, 30(5): 529-534.
[12] KIM D Y, YUN I, KIM H J.Fabrication of rough Al doped ZnO films deposited by bw pressure chemical vapor deposition for high efficiency thin film solar cells[J]. Current Applied Physics, 2010, 10: 459-462.
[13] TANG W, CAMERON D C.Aluminum-doped Zinc oxide transparent conductors deposited by the sol-gel process[J]. Thin Solid Films, 1994, 238(1): 83-87.
[14] NING Z Y, CHENG S H, GE S B, et al.Preparation and characterizationof ZnO: Al films by pulsed laser deposition[J]. Thin Solid Films, 1997, 307: 50-53.
[1] ZHANG Hui, Wang Xiao-bo, ZHANG Wei-xin, GONG Chun-zhi, TIAN Xiu-bo. Effect of Substrate Bias Mode on Structure and Hydrogen Resistance of CrN Thin Films [J]. VACUUM, 2022, 59(1): 18-23.
[2] ZHU Bei-bei, NI Chang, QIN Lin, CHU Jian-ning, CHEN Xiao, XU Jian-feng. Nano Film Deposition Technology Based on Magnetron Sputtering [J]. VACUUM, 2021, 58(6): 21-26.
[3] YANG Zhao, LUO Jun-yao, LI Bao-chang, LI Shu-hua, TA Shi-wo, FU Zhen-xiao, NING Hong-long. Effect of Metallic Multilayer Films on Gold Wire Bonding Properties [J]. VACUUM, 2021, 58(6): 43-47.
[4] HE Ping, ZHANG Xu, YANG yang. Study on Magnetron Sputtering Film Process on Inner Wall of Cylinder with Different Matrix Materials [J]. VACUUM, 2021, 58(6): 33-37.
[5] WEI Meng-yao, WANG Hui, HAN Wen-fang, WANG Hong-li, SU Yi-fan, TANG Chun-mei, DAI Ming-jiang, SHI Qian. Study on Electrochromic Properties of Tungsten Oxide Films Deposited by Medium Frequency Magnetron Sputtering [J]. VACUUM, 2021, 58(5): 50-56.
[6] ZHANG Xiao-xia, DENG Jin-xiang, KONG Le, LI Rui-dong, YANG Zi-shu, ZHANG Jie. Preparation and Study of Si-doped β-Ga2O3 Thin Films with Different Content [J]. VACUUM, 2021, 58(5): 57-61.
[7] ZHANG Jian, NIU Xia-bin, LI Jian-hao, QI Zhen-hua. Effect of RF Power and Sputtering Pressure on Al Film Sputtered on Polythylene Terephthalate Substrates [J]. VACUUM, 2021, 58(4): 21-24.
[8] FU Xue-cheng, XU Jin-bin, WU Li-ying, HUANG Sheng-li, WANG Ying. Study on Uniformity of Inclined Magnetron Sputtering with Small Circular Plane Target [J]. VACUUM, 2021, 58(4): 1-5.
[9] YU Hua-jun, ZHAO Xi-jun, WU Rui-jun. Solutions for Asymmetrical Target Erosion Due to Cross-Cathode Effect [J]. VACUUM, 2021, 58(3): 51-54.
[10] YANG Zi-shu, DUAN Ping, DENG Jin-xiang, ZHANG Xiao-xia, ZHANG Jie, YANG Qian-qian. Preparation and Study of Mg-doped β-Ga2O3 Thin Films with Different Content [J]. VACUUM, 2021, 58(3): 30-34.
[11] CHEN Zhi-tao. Development of Coating Equipment for Four Meter Trough Vacuum Solar Collector [J]. VACUUM, 2021, 58(2): 20-26.
[12] WU Jian-kun, LI Zhao-guo, PENG Li-ping, YI yong, ZHANG Ji-cheng. Effect of Nitrogen Ratio on Structure and Color of ZrN thin Films [J]. VACUUM, 2021, 58(1): 57-62.
[13] WANG Kun, WANG Shi-qing, LI Jian, DAN Min, CHEN Lun-jiang. Thickness Uniformity of Anti-Seizing Coating for Fasteners Prepared by Magnetron Sputtering [J]. VACUUM, 2021, 58(1): 67-71.
[14] DAI Yong-xi, YANG Qian-qian, DENG Jin-xiang, KONG le, LIU Hong-mei, YANG Kai-hua, WANG Ji-you. Preparation and Study of ZTO Thin Film Doped with Different Si Content [J]. VACUUM, 2020, 57(6): 23-26.
[15] WEI Xian-lu, GONG Chen-yang, XIAO Jian-rong. Structure and Optical Properties of MoS2 Thin Films Prepared by RF Reactive Magnetron Sputtering [J]. VACUUM, 2020, 57(5): 11-13.
Viewed
Full text


Abstract

Cited
  Shared   
  Discussed   
[1] LI De-tian, CHENG Yong-jun, ZHANG Hu-zhong, SUN Wen-jun, WANG Yong-jun, SUN Jian, LI Gang, . Preparations and applications of carbon nanotube field emitters[J]. VACUUM, 2018, 55(5): 1 -9 .
[2] ZHOU Bin-bin, ZHANG jian, HE Jian-feng, DONG Chang-kun. Carbon nanotube field emission cathode based on direct growth technique[J]. VACUUM, 2018, 55(5): 10 -14 .
[3] LI Zhi-sheng. Development of ultra large shielded door for infrared calibration in simulated space environment[J]. VACUUM, 2018, 55(5): 66 -70 .
[4] ZHENG Lie, LI Hong. Design of 200kV/2mA continuous adjustable DC high voltage generator[J]. VACUUM, 2018, 55(6): 10 -13 .
[5] CHAI Xiao-tong, WANG Liang, WANG Yong-qing, LIU Ming-kun, LIU Xing-zhou, GAN Shu-yi. Operating parameter data acquisition system for single vacuum pump based on STM32F103 microcomputer[J]. VACUUM, 2018, 55(5): 15 -18 .
[6] SUN Li-zhi, YAN Rong-xin, LI Tian-ye, JIA Rui-jin, LI Zheng, SUN Li-chen, WANG Yong, WANG Jian, . Research on distributing law of Xenon in big accumulation chamber[J]. VACUUM, 2018, 55(5): 38 -41 .
[7] HUANG Si, WANG Xue-qian, MO Yu-shi, ZHANG Zhan-fa, YING Bing. Experimental study on similarity law of liquid ring compressor performances[J]. VACUUM, 2018, 55(5): 42 -45 .
[8] JI Ming, SUN Liang, YANG Min-bo. Design of automatic sealing and locking scheme for lunar sample[J]. VACUUM, 2018, 55(6): 24 -27 .
[9] LI Min-jiu, XIONG Tao, JIANG Ya-lan, HE Yan-bin, CHEN Qing-chuan. 20kV high voltage based on double transistor forward converter pulse power supply for metal deburring[J]. VACUUM, 2018, 55(5): 19 -24 .
[10] LIU Yan-wen, MENG Xian-zhan, TIAN Hong, LI Fen, SHI Wen-qi, ZHU Hong, GU Bing. Test of ultra high vacuum in space traveling-wave tube[J]. VACUUM, 2018, 55(5): 25 -28 .
辽ICP备06004570号-4
Copyright © VACUUM, All Rights Reserved.
Tel: （024）24134406 24110136 24121929　Fax: （024） 24121929　E-mail: zkzk1964@126.com
Powered by Beijing Magtech Co. Ltd