欢迎访问沈阳真空杂志社 Email Alert    RSS服务

VACUUM ›› 2022, Vol. 59 ›› Issue (6): 17-21.doi: 10.13385/j.cnki.vacuum.2022.06.03

• Thin Film • Previous Articles     Next Articles

Study on Surface Modification of Zr/ZrVFe Porous Getter Material

SUN Wen-jun1,2, FENG Xin-ge1, SONG Yi2, PEI Xiao-qiang2, WU Cheng-yao2   

  1. 1. School of Physical Science and Technology, Lanzhou University, Lanzhou 730000, China;
    2. Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
  • Received:2022-02-09 Online:2022-11-25 Published:2022-12-05

Abstract: Ni films with different thickness were prepared on the surface of Zr/ZrVFe porous getter by magnetron sputtering technology. The influence of Ni films on the gettering performance of the getter was studied. The surface morphology and elemental composition of getter were analyzed by SEM and EDS technology,and the gettering performance at room temperature was studied by constant volume method. The results show that during the getter activation process, H2O, CO2 and CO/N2 have been desorbed below 350℃. When the activation temperature reaches 350-450℃, only H2 and CH4 remain in the desorption gas,and CH4 is obtained by the reaction between the H2 and the filament of the four-stage mass spectrometer. The as-prepared Ni film uniformly covers the getter surface without changing the getter surface morphology. The surface modification of getter by Ni film obviously increases the getter capacity. The equilibrium pressure of getter obtained by coating for 2h is the smallest and the adsorption performance is the best.

Key words: Zr/ZrVFe, porous getter, surface modification, Ni film

CLC Number: 

  • TB741
[1] 李洋. Ti-Mo吸气材料注射成形脱脂及烧结工艺的研究[D]. 北京: 北京有色金属研究总院, 2014.
[2] 颜攀, 韩兴博, 冷海燕, 等. 非蒸散型吸气剂的研究进展[J]. 真空科学与技术学报, 2018, 38(8): 650-656.
[3] 崔航. ZrV系合金吸气特性和应用研究[D]. 北京: 北京有色金属研究总院, 2015.
[4] 宋伊, 冯焱, 成永军, 等. 非蒸散型吸气材料研究现状及进展[J]. 中国有色金属学报, 2021, 31(8): 2160-2170.
[5] FATTAHZADEH M, KAFLOU A, DASHTIZAD V.Effect of milling and adding yttrium on sorption characteristics of Zr-Co based nanostructure chemical getter[J]. Journal of Alloys and Compounds, 2020, 846: 155329.
[6] MANINI P, MACCALLINI E.NEG pumps: sorption mechanisms and applications[C]//Proceedings of the 2017 CERN, 2017: 137-152.
[7] DI X B, XIE Z G, CHEN J M, et al.Residual gas analysis in vacuum insulation panel(VIP)with glass fiber core and investigation of getter for VIP[J]. Building and Environment, 2020, 186: 107337.
[8] HENMI H, SHOJI S, SHOJI Y, et al.Vacuum packaging for microsensors by glass-silicon anodic bonding[J]. Sensors and Actuators A: Physical, 1994, 43(1-3): 243-248.
[9] 迟煜頔, 谈萍, 荆鹏, 等. 吸气材料的研究现状及进展[J]. 材料导报, 2009, 23(5): 48-54.
[10] 李晓刚, 罗志芳. 非蒸散型吸气剂吸气性能测试方法的研究[J]. 真空, 2017, 54(2): 60-63.
[11] FERRARIO B, FIGINI A, BORGHI M.A new generation of porous non-evaporable getters[J]. Vacuum, 1985, 35(1): 13-17.
[12] CHAOZHUO L, LIQUN S.Effect of nickel alloying layer on hydrogen absorption ability of Zr-Al getter material[J]. Chinese Physics Letters, 2004, 21: 1035-1038.
[13] LEE S M, PARK Y J, LEE H Y, et al.Hydrogen absorption properties of a Zr-Al alloy ball-milled with Ni powder[J]. Intermetallics, 2000, 8(7): 781-784.
[14] 朱雷, 王海静, 彭松华, 等. 对吸气剂除气有关要素的探讨[J]. 真空, 2013, 50(1): 75-79.
[15] CUEVAS F, LATROCHE M.Intermetallic alloys as hydrogen getters[J]. Journal of Alloys and Compounds, 2022, 905: 164173.
[16] LIU B G, ZHANG B, WU Y, et al.Theoretical prediction and experimental study on catalytic mechanism of incorporated Ni for hydrogen absorption of Mg[J]. International Journal of Hydrogen Energy, 2019, 44(51): 27885-27895.
[17] LISCO F, KAMINSKI P M, ABBAS A, et al.High rate deposition of thin film cadmium sulphide by pulsed direct current magnetron sputtering[J]. Thin Solid Films, 2015, 574: 43-51.
[18] TAO J G, CHAI J W, LU X, et al.Growth of wafer-scale MoS2 monolayer by magnetron sputtering[J]. Nanoscale, 2015, 7(6): 2497-2503.
[19] RAHMAN M M, BASHER M K, VASILIEV M, et al.Optical and chromaticity properties of metal-dielectric composite-based multilayer thin-film structures prepared by rf magnetron sputtering[J]. Coatings, 2020, 10(3): 251.
[20] BENNETT J R J, HUGHES S, ELSEY R J, et al. Outgassing from stainless steel and the effects of the gauges[J]. Vacuum, 2004, 73(2): 149-153.
[21] MORAW G.The influence of ionization gauges on gas flow measurements[J]. Vacuum, 1974, 24(3): 125-128.
[1] YUAN Ren-yue, BAI Xue-wei, LI Hao-zhe, SUN Shi-jie, ZHAI Yan-kun. Research and Prospect on Surface Modification of Agricultural Machinery Farming Parts [J]. VACUUM, 2022, 59(3): 57-62.
[2] SUN Fei, Wang Lei, He Yun-peng, BA De-chun, SONG Gui-qiu, LIN Zeng. Research Progress of Fretting Damage and Interface Strengthening in Dental Implant System [J]. VACUUM, 2020, 57(5): 32-37.
[3] WANG Di, LIN Song-sheng, LIU Ling-yun, YANG Hong-zhi, JIANG Bai-ling, XUE Yu-na, ZHOU Ke-song. Research Progress of Surface Treatment Technology on Fatigue Properties of Titanium Alloy [J]. VACUUM, 2019, 56(6): 36-42.
[4] RAN Biao, LI Liu-he. The development and application of anode layer ion source [J]. VACUUM, 2018, 55(5): 51-57.
Viewed
Full text


Abstract

Cited
  Shared   
  Discussed   
[1] LI De-tian, CHENG Yong-jun, ZHANG Hu-zhong, SUN Wen-jun, WANG Yong-jun, SUN Jian, LI Gang, . Preparations and applications of carbon nanotube field emitters[J]. VACUUM, 2018, 55(5): 1 -9 .
[2] ZHOU Bin-bin, ZHANG jian, HE Jian-feng, DONG Chang-kun. Carbon nanotube field emission cathode based on direct growth technique[J]. VACUUM, 2018, 55(5): 10 -14 .
[3] LI Zhi-sheng. Development of ultra large shielded door for infrared calibration in simulated space environment[J]. VACUUM, 2018, 55(5): 66 -70 .
[4] ZHENG Lie, LI Hong. Design of 200kV/2mA continuous adjustable DC high voltage generator[J]. VACUUM, 2018, 55(6): 10 -13 .
[5] CHAI Xiao-tong, WANG Liang, WANG Yong-qing, LIU Ming-kun, LIU Xing-zhou, GAN Shu-yi. Operating parameter data acquisition system for single vacuum pump based on STM32F103 microcomputer[J]. VACUUM, 2018, 55(5): 15 -18 .
[6] SUN Li-zhi, YAN Rong-xin, LI Tian-ye, JIA Rui-jin, LI Zheng, SUN Li-chen, WANG Yong, WANG Jian, . Research on distributing law of Xenon in big accumulation chamber[J]. VACUUM, 2018, 55(5): 38 -41 .
[7] HUANG Si, WANG Xue-qian, MO Yu-shi, ZHANG Zhan-fa, YING Bing. Experimental study on similarity law of liquid ring compressor performances[J]. VACUUM, 2018, 55(5): 42 -45 .
[8] JI Ming, SUN Liang, YANG Min-bo. Design of automatic sealing and locking scheme for lunar sample[J]. VACUUM, 2018, 55(6): 24 -27 .
[9] LI Min-jiu, XIONG Tao, JIANG Ya-lan, HE Yan-bin, CHEN Qing-chuan. 20kV high voltage based on double transistor forward converter pulse power supply for metal deburring[J]. VACUUM, 2018, 55(5): 19 -24 .
[10] LIU Yan-wen, MENG Xian-zhan, TIAN Hong, LI Fen, SHI Wen-qi, ZHU Hong, GU Bing. Test of ultra high vacuum in space traveling-wave tube[J]. VACUUM, 2018, 55(5): 25 -28 .
辽ICP备06004570号-4
Copyright © VACUUM, All Rights Reserved.
Tel: （024）24134406 24110136 24121929　Fax: （024） 24121929　E-mail: zkzk1964@126.com
Powered by Beijing Magtech Co. Ltd