欢迎访问沈阳真空杂志社 Email Alert    RSS服务

VACUUM ›› 2025, Vol. 62 ›› Issue (4): 49-53.doi: 10.13385/j.cnki.vacuum.2025.04.09

• Vacuum Metallurgy and Thermal Engineering • Previous Articles     Next Articles

Effect of Graphite-Plate Thickness on the Temperature Field in Silicon Carbide Vacuum Sintering Furnace

ZHOU Mingxu, LI Jianchang   

  1. Vacuum and Fluid Engineering Research Center, School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110819, China
  • Received:2024-10-31 Online:2025-07-25 Published:2025-07-24

Abstract: The vacuum sintering furnace is a crucial apparatus for the growth of silicon carbide, where the temperature uniformity within the furnace serves as a key performance indicator, directly impacting the quality of the workpieces. In this paper, numerical simulations on the temperature field inside a vacuum sintering furnace was conducted to investigate the influence of graphite-plate thickness on temperature uniformity. The results indicate that the thickness of the lower support plate has the most significant effect on furnace temperature uniformity, followed by the cover plate, while the side plate exerts a negligible role. The optimized thicknesses of the lower, cover and side plates are 50, 20 and 60 mm, respectively, the maximum temperature difference within workpieces thus decreased by 19.1 ℃ i.e., 10.7%. This study may provide valuable insights for the design and optimization of graphite plate of vacuum sintering furnace.

Key words: vacuum sintering furnace, numerical simulation, graphite plate, temperature field

CLC Number:  TB756;TK175

[1] 王旭东,周扬,袁怡. 烧结温度对SiC多孔陶瓷性能的影响[J]. 功能材料,2022,53(1):1072-1076
[2] 闫学增,吴晓,杨亚云,等. 反应烧结制备碳化硅-氮化铝复合材料[J]. 硅酸盐通报,2016,35(3):682-685.
[3] 王艳香,谭寿洪,江东亮. 反应烧结碳化硅的研究与进展[J]. 无机材料学报,2004,19(3):456-462
[4] 王昊杰,李勇,王昭东,等. 真空渗碳炉加热室温度场数值模拟与分析[J]. 热加工工艺,2016,45(24):172-176.
[5] 熊梨,张登春,宋石初,等. 碳化硅真空烧结炉温度场数值模拟与系统优化[J]. 金属热处理,2022,47(6):259-265.
[6] 王硕彬. 真空炉炉胆温度场及热变形模拟研究[D]. 北京:机械科学研究总院, 2023.
[7] LI B, SU F Y, LI C W, et al.Study on temperature uniformity of workpieces in multi-layer trays inside vacuum sintering furnace for cemented carbide[J]. International Journal of Thermal Sciences, 2023, 196: 108728.
[8] 张铭智. 基于ANSYS的真空炉瞬态温度场模拟及生产工艺优化[D]. 镇江:江苏科技大学, 2022.
[9] 许晓平,王跃飞,雷金辉,何宇翔,陈焰.内热式多级连续真空炉温度场的有限元分析[J].特种铸造及有色合金,2013,33(10):904-907.
[10] 王婧,唐丽娜,王皓,等. 真空炉内温度场的模拟及真空加热工艺评估[J]. 热处理,2021,36(1):1-5.
[11] 梁佰强,王海龙. 基于ANSYS高真空钎焊炉温度场数值模拟研究[J]. 热加工工艺,2020,49(21):139-142.
[12] 王磊. 氮化铝陶瓷烧结炉温度均匀性对烧结产品质量影响的研究[J]. 电子工业专用设备,2010,39(6):34-36.
[13] FU Z L, YU X H, SHANG H L, et al.A new modelling method for superalloy heating in resistance furnace using FLUENT[J]. International Journal of Heat and Mass Transfer, 2019, 128: 679-687.
[14] 韩立勇,杨星团,姜胜耀,等. 真空石墨加热器温度场数值模拟与分析[J]. 原子能科学技术,2011,45(5):559-563.
[15] 刘静,李家栋,王昊杰,等. 真空渗碳炉加热系统结构优化数值模拟研究[J]. 东北大学学报(自然科学版),2019,40(5):641-646.
[16] 王成军. 辐射离散坐标法在柱形炉膛中的辐射传热计算[J]. 材料与冶金学报, 2009, 8(3): 213-216.
[17] HAO X W, GU J F, CHEN N L, et al.3-D Numerical analysis on heating process of loads within vacuum heat treatment furnace[J]. Applied Thermal Engineering, 2008, 28(14/15): 1925-1931.
[18] KRUMOV K S, PENKOVA N Y.Numerical analysis of the transient heat transfer in high temperature chamber furnaces[J]. Materials Science and Engineering, 2019, 595(1): 012005.
[19] LOUSSOUARN T, MAILLET D, REMY B, et al.Model reduction for experimental thermal characterization of a holding furnace[J]. Heat and Mass Transfer, 2018, 54: 2443-2452.
[20] 丁智超,王海龙. 真空钎焊炉全工艺过程温度场数值模拟及工艺优化[J]. 焊接技术,2024,53(1):55-60.
[1] QIU Rongsheng, LI Jianchang. Effect of Coil Size and Layout on Temperature Field of Induction Furnace for 12-inch Silicon Carbide Single Crystal Growth [J]. VACUUM, 2025, 62(3): 1-8.
[2] SONG Xin, GUO Jian-zhang. Research on the Pumping Performance of a Multi-stage Series Nozzle Liquid-gas Jet Pump Based on Fluent [J]. VACUUM, 2024, 61(3): 40-45.
[3] YU Da-yang, WU Gai. Numerical Simulation of the Influence of Gas Distribution and Film Deposition Process in MOCVD Reactor with Large-sized Square Carrier [J]. VACUUM, 2024, 61(2): 22-28.
[4] HE Tian-yi, YUE Xiang-ji, ZHANG Zhi-jun, BA De-chun, FENG Xiao-rong, YANG Fan. Numerical Simulation of Gas Flow in a Fixed Pitch Screw Vacuum Pump [J]. VACUUM, 2024, 61(1): 52-57.
[5] XING Yin-long, WU Jie-feng, PEI Shi-lun, LIU Zhi-hong, LI Bo, LIU Zhen-fei, MA Jian-guo. Study on the Forming Technology of Boat-shaped High Frequency Cavity Shell [J]. VACUUM, 2023, 60(6): 78-83.
[6] LI Ping-chuan, XU Li, ZHAO Jie, ZHANG Fan, XIONG Si-wei, JIAN Yi, ZHANG Zheng-hao, TANG De-li. Numerical Simulation and Experimental Research on Miniaturized Anode Layer Thruster [J]. VACUUM, 2023, 60(4): 36-41.
[7] LIU Xing-long, SHEN Pei, WANG Guang-wen, YUE Xiang-ji, LIN Zeng. Influence of Cooling Structure on Vacuum Arc Source Temperature [J]. VACUUM, 2022, 59(6): 29-33.
[8] WANG Gui-peng, HUANG Yu-xing, QU Shao-fen, GAO Guang-wei, XIE Yuan-hua, LIU Kun, BA De-chun. Study on Influence of the Change of Inlet and Outlet Angle of Impeller Blade of Vacuum Heat Treatment Furnace on Cooling Efficiency [J]. VACUUM, 2022, 59(5): 63-68.
[9] FANG Ming-yuan, WU Yue, ZHANG Yang, XU Zhong-xu. Simulation on Thermal Comfort of Astronaut Wearing Space Suit Under the Condition of Cabin Pressure Loss [J]. VACUUM, 2022, 59(4): 80-85.
[10] LIU Sheng, CUI Yu-hao, DOU Ren-chao, SHI Li-xia, SUN Li-chen, REN Guo-hua, YAN Rong-xin. Numerical Simulation on Internal Pressure Variation of Test Specimens During Vacuum Test [J]. VACUUM, 2022, 59(3): 12-15.
[11] WANG Jun-wei, GONG Jie, DING Wen-jing, XU Jing-hao, GU Miao, ZHANG Li-ming. Numerical Simulation and Analysis of Spatial Rapid Decompression Process Based on Dynamic Grid [J]. VACUUM, 2022, 59(2): 32-37.
[12] DAI Chen, NAN Hai-juan, SHENG Xiao-yang, CONG Lun-gang, LI Cai-xia. Modification of the Control System of Vacuum Sintering Furnace for Porous Metal Materials [J]. VACUUM, 2021, 58(4): 63-66.
[13] LI Cheng-ming, SU Ning, LI Lin, YAO Wei-zhen, YANG Shao-yan. Flow Field Analysis and Large-Scale Material Growth in a Vertical Graded Varying Velocity Hydride Vapor Phase Epitaxy（HVPE） Reactor [J]. VACUUM, 2021, 58(2): 1-5.
[14] YU Qing-zhou, ZHANG Jun, LI Bin, GAO Ming-yi, LIU Ming-kun, CHAI Xiao-tong, GAN Shu-yi. Optimization of Temperature Field in Vacuum Degreasing Drying Tank for Air Conditioning Radiator [J]. VACUUM, 2021, 58(1): 82-85.
[15] ZHU Zhi-peng, QIN Bin-wei, ZHANG Ying-li, YUE Xiang-ji, BA De-chun. Experimental Study on Particle Image Velocimetry of Rarefied Gas Flow [J]. VACUUM, 2021, 58(1): 38-44.
Viewed
Full text


Abstract

Cited
  Shared   
  Discussed   
[1] LI De-tian, CHENG Yong-jun, ZHANG Hu-zhong, SUN Wen-jun, WANG Yong-jun, SUN Jian, LI Gang, . Preparations and applications of carbon nanotube field emitters[J]. VACUUM, 2018, 55(5): 1 -9 .
[2] ZHOU Bin-bin, ZHANG jian, HE Jian-feng, DONG Chang-kun. Carbon nanotube field emission cathode based on direct growth technique[J]. VACUUM, 2018, 55(5): 10 -14 .
[3] CHAI Xiao-tong, WANG Liang, WANG Yong-qing, LIU Ming-kun, LIU Xing-zhou, GAN Shu-yi. Operating parameter data acquisition system for single vacuum pump based on STM32F103 microcomputer[J]. VACUUM, 2018, 55(5): 15 -18 .
[4] LI Min-jiu, XIONG Tao, JIANG Ya-lan, HE Yan-bin, CHEN Qing-chuan. 20kV high voltage based on double transistor forward converter pulse power supply for metal deburring[J]. VACUUM, 2018, 55(5): 19 -24 .
[5] LIU Yan-wen, MENG Xian-zhan, TIAN Hong, LI Fen, SHI Wen-qi, ZHU Hong, GU Bing. Test of ultra high vacuum in space traveling-wave tube[J]. VACUUM, 2018, 55(5): 25 -28 .
[6] XU Fa-jian, WANG Hai-lei, ZHAO Cai-xia, HUANG Zhi-ting. Application of chemical gases vacuum-compression recovery system in environmental engineering[J]. VACUUM, 2018, 55(5): 29 -33 .
[7] XIE Yuan-hua, HAN Jin, ZHANG Zhi-jun, XU Cheng-hai. Discussion on present situation and development trend of vacuum conveying[J]. VACUUM, 2018, 55(5): 34 -37 .
[8] SUN Li-zhi, YAN Rong-xin, LI Tian-ye, JIA Rui-jin, LI Zheng, SUN Li-chen, WANG Yong, WANG Jian, . Research on distributing law of Xenon in big accumulation chamber[J]. VACUUM, 2018, 55(5): 38 -41 .
[9] HUANG Si, WANG Xue-qian, MO Yu-shi, ZHANG Zhan-fa, YING Bing. Experimental study on similarity law of liquid ring compressor performances[J]. VACUUM, 2018, 55(5): 42 -45 .
[10] CHANG Zhen-dong, MU Ren-de, HE Li-min, HUANG Guang-hong, LI Jian-ping. Reflectance spectroscopy study on TBCs prepared by EB-PVD[J]. VACUUM, 2018, 55(5): 46 -50 .
辽ICP备06004570号-4
Copyright © VACUUM, All Rights Reserved.
Tel: （024）24134406 24110136 24121929　Fax: （024） 24121929　E-mail: zkzk1964@126.com
Powered by Beijing Magtech Co. Ltd