VACUUM ›› 2020, Vol. 57 ›› Issue (3): 11-16.doi: 10.13385/j.cnki.vacuum.2020.03.03
• Thin Film • Previous Articles Next Articles
WANG Xin, XU Zhen-hua, PENG Chao, DAI Jian-wei, HE Li-min, MU Ren-de
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