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VACUUM ›› 2020, Vol. 57 ›› Issue (3): 21-24.doi: 10.13385/j.cnki.vacuum.2020.03.05

• Thin Film • Previous Articles     Next Articles

Influence of Annealing Temperature on Microstructure, Wettability of TiO2Films

LI Xiao-min, WU Ying-tong, BAI Rui, WANG Dong-wei, HUANG Mei-dong   

  1. College of Physics and Materials Science, Tianjin Normal University, Tianjin 300387, China
  • Received:2019-03-26 Published:2020-06-18

Abstract: Influence of annealing temperature on microstructure and hydrophobicity of the TiO2 films is studied, which are obtained by anodic oxidation from metallic titanium coatings previously deposited by arc ion plating on glass. Microstructure, surface morphology and wettability of the films are investigated by the X-ray diffraction, scanning electron microscopy and contact angle tester, respectively. The results show that the as-oxidized amorphous TiO2 films become crystalline after the annealing. The crystalline structure of the TiO2 films transits from anatase to rutile as the annealing temperature is enhanced. Spiral, nano-wire, and cotton-like surface morphology of the films are observed as the annealing temperature increases. The contact angle is enlarged by annealing and the maximum value of 121.78° is achieved at 500℃.

Key words: TiO2 film, anodic oxidation, annealing temperature, hydrophobicity

CLC Number: 

  • O484.2
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