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VACUUM ›› 2022, Vol. 59 ›› Issue (2): 48-54.doi: 10.13385/j.cnki.vacuum.2022.02.10

• Thin Film • Previous Articles     Next Articles

Effects of Cr/CrN Interlayer Thickness on Properties of Carbon-based Films Prepared on Copper Alloy

XU Tian-yang1,2, LI Zhen-dong2, ZHAN Hua1, SI Yan-long1, LIU Ji-bin1, WANG Rui-jun1,2   

  1. 1. Chinese Academy of Agricultural Mechanization Sciences, Beijing 100083, China;
    2. Beijing Golden Wheel Special Machine Co., Ltd., Beijing 100083, China
  • Received:2021-11-10 Online:2022-03-25 Published:2022-04-14

Abstract: In order to improve the poor impact resistance of thin films prepared on copper alloy, chromium doped diamond-like carbon（Cr-DLC） films with Cr/CrN interlayer of different thickness were prepared on KK3 copper alloy. Cross-section morphology, microstructure,mechanical properties and impact resistance of Cr-DLC films were studied by scanning electron microscope, Raman spectra, nanoindentation and repetitive impact tester, respectively. The results illustrate that the residual stress, elastic modulus, adhesion strength and impact resistance of Cr-DLC films have close connections with thickness of Cr/CrN interlayer. Residual stress of Cr-DLC coated copper alloy decreases first and then increases with the interlayer thickness increasing, which reaches the least value of -0.47GPa when the interlayer thickness was 1.01μm, and the hardness and elastic modulus of Cr-DLC films are 11.68GPa and 144.54GPa, respectively. Adhesion strength increases first and then decreases with the increase of interlayer thickness, which reaches the maximum of 50N when the interlayer is 1.01μm. Impact craters are generated on the surface of all Cr-DLC coated samples with Cr/CrN interlayer of different thickness after repetitive impact test of 30000 times, a certain area of film spallation is observed at the central zone of impact craters, and the sample with Cr/CrN interlayer of 1.01μm has the least indentation volume of 9.241×106μm3, which shows the best impact resistance. In summary, for Cr-DLC films with Cr/CrN interlayer prepared on copper alloy,when the thickness of Cr/CrN interlayer is 1.01μm and the whole thickness of the films is less than 8μm, the films show the best impact resistance.

Key words: copper alloy, carbon-based film, impact resistance, interlayer

CLC Number: 

  • TG178
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