物理气相沉积热障涂层批量生产用球坑仪快速测厚法研究*

doi:10.13385/j.cnki.vacuum.2022.06.13

Abstract

Abstract: In order to test the thickness of thermal barrier coatings quickly and accurately in industrial production, this paper discusses a method of thickness measurement for PVD NiCrAlYSi coating and YSZ coating by using ball crater tester. First, The NiCrAlYSi coating and YSZ coating with thickness of 120μm was deposited on GH3039 superalloy substrate by arc ion plating and EB-PVD respectively. The relationship of particle size in polishing slurry, grinding time and dimension of ball crater was obtained. Then, according to the above experimental results, the thickness of NiCrAlYSi and YSZ coatings on superalloy specimens was measured by ball crater tester, and the results of ball crater tester and metallographical measurement were compared. The results show that the dimension of ball crater has a parabolic relation with milling time for the NiCrAlYSi coating and YSZ coating. Under the same conditions,the dimension of ball crater is the same when the size of particle in polishing slurry is 5μm and 10μm, both of which are much larger than that of the particle size of 1μm. The result of ball crater tester is highly identical with that of metallographical measurement, and the relative error is less than 6%.

Key words: thermal barrier coating, PVD, coating thickness, ball crater tester

CLC Number:

TB44

DENG Zhong-hua, CHANG Zhen-dong, XU Lei, HU Jiang-wei, CAI Yan, MU Ren-de. Research of Quick Measurement for PVD TBCs Thickness in Industrial Production Using Ball Crater Tester[J].VACUUM, 2022, 59(6): 73-77.

References

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Research of Quick Measurement for PVD TBCs Thickness in Industrial Production Using Ball Crater Tester

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