VACUUM ›› 2023, Vol. 60 ›› Issue (4): 1-7.doi: 10.13385/j.cnki.vacuum.2023.04.01
• Thin Film • Next Articles
LIN Song-sheng1, LIU Ruo-yu2, TIAN Tian1, LÜ Liang2, SU Yi-fan1, WANG Yun-cheng2, SHI Qian1, YUN Hai-tao2, TANG Peng1, ZHENG Cai-feng2, YI Chu-shan2
CLC Number: TG174.4;TB43
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