In order to study the effect of thickness on structure and properties of Cr-CrN-Cr-CrAlN coatings, multilayer coatings with different thicknesses were prepared on TC4 titanium alloy by vacuum cathodic arc ion plating. Scanning electron microscope(SEM), X-ray diffraction(XRD), microhardness tester, scratch tester, stress tester, sand erosion tester and tensile tester were used to analyze and detect the surface and cross-section morphology, structure, thickness, hardness, adhesion, residual stress, sand erosion resistance and tensile property of the multilayers. The results show that with the increase of multilayer thickness, particles on the surface of the film increase,the surface quality of the coatings decreases slightly and the coating growth orientation changes from (200) to (111) crystal plane. With the increase of multilayer thickness, the internal stress of the coatings increases, and the hardness, adhesion strength, crack propagation resistance increase first and then decrease. When the thickness is 10.58μm, the optimal mechanical properties with hardness of 3404HV, binding force of 58.6N, crack growth resistance of 758.49 are obtained, and the erosion resistance increases by more than 3 times. After TC4 titanium alloy surface is coated with multilayer film,the yield strength and tensile strength of TC4 are slightly increased, while the elongation after fracture is decreased. In particular, when the thickness of the coating reaches 14.50μm, the elongation after fracture is reduced by 30% compared with that of the substrate. Increasing the coating thickness in a certain range is beneficial to improving the mechanical properties. However, it needs to be controlled to reduce the negative impact on the mechanical properties of titanium alloy substrate.

By controlling winding speed, cathode power, process pressure, linear ion source current, thickness of NiCr seed layer, roll to roll magnetron sputtering machine was used to deposit nano-copper film on the surface of organic film substrate, in order to improve electronic property of copper current collector. The sheet resistance of copper coating was characterized by four-probe method, and the influence of different process parameters on the sheet resistance of copper coating were obtained. The results show that with the increase of running speed of substrate, the sheet resistance increases quadratically, and with the increase of cathode power, the sheet resistance decreases in power. In the process pressure range of 0.13~0.45Pa, the sheet resistance reaches the minimum at 0.2Pa. With the ion source current increasing in the range of 0~0.7A, the sheet resistance decreases linearly. NiCr seed layer can improve the sheet resistance of copper layer, and the sheet resistance of copper coating with 6.7nm NiCr seed layer is 23.2% lower than that of copper coating without seed layer.

The effect of oil mist pollution on micromorphology and element content of sputtered substrate(silicon wafer, weighing paper, copper foil and glass slide) was studied through optical microscope, field emission scanning electron microscope, energy spectrometer and atomic force microscope. The results show that after sputtering deposition for different times, spherical particles appear on the silicon substrate, and the particles gather or grow with the increase of sputtering time. The carbon content of silicon wafer before sputtering is 4.55%, and it rises to about 31.55% after 50s of sputtering deposition. The optical morphology of copper foil and weighing paper after sputtering deposition for 50s has little difference from the sample before sputtering, and there is no spherical particle. The optical morphology of glass slide after sputtering deposition for 50s is similar to that of the silicon slide, spherical particles are randomly distributed on the surface. The silicon substrate is extremely sensitive to oil mist pollution, which is characterized by spherical particles distributed on the surface of the sample after sputtering treatment,and the mass fraction of carbon is about 7-8 times of that before sputtering.

A layer of organic film was coated on the PET substrate with polyacrylate polyol resin, and an inorganic film was deposited on the organic coating by plasma enhanced atomic layer deposition(PE-ALD)to obtain functional PET composite film. The effects of organic coating thickness, PE-ALD coating type and PE-ALD coating temperature on the water vapor barrier property and light transmission property of PET composite films were investigated by water vapor transmittance tester and ultraviolet-visible-near-infrared spectrophotometer. The results show that the thickness of polyacrylate polyol organic coating film has little effect on the water vapor barrier property and light transmittance of the PET composite film.The Al₂O₃ film deposited by PE-ALD can greatly improve the water vapor barrier property of the PET composite film, and the water vapor barrier property is the best when the PE-ALD coating temperature is 100℃,reaching 0.17g·m^-2·d^-1.

Oxide thin film transistors(TFT) are the core driving components of active matrix organic light-emitting diodes, and are the key technology for developing new displays today. They have broad application prospects in flat panel displays. However, there are a large number of defect states in oxide semiconductors caused by oxygen vacancies, which destroy the performance and stability of TFT device, and become a bottleneck technical problem for its commercialization. Therefore, IZO TFT was prepared by RF-sputtering and treated with O₂ plasma to study the effects of O₂ plasma treatmert on IZO film and device performance and stability. The results show that after plasma treatment, the mobility of IZO TFT increases from 8.2cm²/（V·s） to 9.5cm²/（V·s）, the threshold voltage changes from -3.2V to -5.1V, the sub-threshold swing decreases from 0.45V/decade to 0.38V/decade, and the switch ratio changes from 2.3×10⁷ to 4.4×10⁷. Under negative light bias, the threshold voltage drift of the device reduces from 7.1V to 3.2V. The threshold voltage drift of the device decreases from 12.5V to 6.4V when aging at 100℃. O₂ plasma treatment can effectively improve the electrical performance and stability of IZO TFT.

The basic principles, particle trajectories and structures of the compact emission guns for electrons and argon ions are introduced respectively. The typical electron guns are used for charge neutralization, pulse emission and high energy electron diffraction. The types of argon ion gun are usually classified to cold cathode, hot cathode and plasma sources. The compact emission guns are playing important roles in the development and application of scientific research, semiconductor industry, life sciences, defense and aerospace.

In this paper, particle grid combined with Monte Carlo collision method was used to simulate the miniaturized anode layer Hall thruster. Meanwhile, the discharge experiment of the miniaturized anode layer Hall thruster was carried out to evaluate its performance. The results show that the discharge of the miniaturized anode layer thruster is stable, and the ion beam presents a bunched mode. The discharge voltage range is 300~1100V, the specific impulse range is 234~2047s, and the thrust range is 0.5~5.4mN. This study can provide certain data support for further optimization design of high efficiency, light mass and high performance micro anode layer Hall thruster.

As an important cooling equipment of nuclear power plants, the tightness of condenser is directly related to the safe operation of nuclear power plants. In this paper, the real working conditions of the condenser(the vacuum side is 7500Pa, the pressure side is 110kPa) are simulated, an experimental system is built based on quadrupole mass spectrometer, and the leakage rates of three gas media including helium, air and SF₆ are studied under different magnitudes of leakage holes(helium equivalent leakage rate is 10^-7~10^-1Pa·m³/s). The results show that under condenser conditions, the leakage rate of the gas medium within the measured magnitude has nothing to do with the type of medium, but only with the nominal leakage rate.

With the increasing of space environment debris, the probability of spacecraft leakage increases significantly due to debris collision, which will inevitably affect the operational life of spacecraft in orbit. It is urgent to study the impact of ultrasonic spectrum of in-orbit leakage. Therefore, this paper focuses on studying the influence law of detection distance, sensing range, detection direction, mobile detection and multilayer on the ultrasonic spectrum characteristics of different leaks. The results show that the airborne leakage ultrasonic leak detection method can detect leakage hole of Ф0.3mm, the detection distance is up to 500mm, the detection direction angle is within ±30°, the characteristic frequency has main peak between 37-43kHz, the mobile inspection positioning accuracy is up to within ±20mm. The multilayer cladding layer has a complex impact on detection, the larger the cladding area, the lower the detection sensitivity and intensity. The research results have certain universality, it could provide technical support for the subsequent implementation of in-orbit leakage plugging measures.

Vacuum micropumps are of great importance for the vacuum packaging of micro-electro-mechanical systems(MEMS)and vacuum microelectronics devices. Based on the operating principle and process realization, the microminiaturization feasibility of common traditional vacuum pumps is analyzed. The developments of vacuum micropumps including membrane pump, Knudsen pump, vapor-jet/diffusion pump and ion sorption pump are introduced, and the technical difficulties are summarized. The results show that although the vacuum micropumps have obvious decrease in exhausting performances and reliabilities compared with their macro predecessors, they are still necessary for the portable and high-vacuum required microsystems with the merits of low-power consumption and ease of integration.

This paper introduces a set of high-precision measuring device for the outgassing rate of vacuum materials based on the method of switching between two pumping paths developed by the engineering machinery vacuum auxiliary laboratory of SSRF Ⅱ beamline project. Based on this method, the outgassing rate of common oxygen free copper material samples in the synchrotron radiation vacuum system was tested. The outgassing amount of the sample with background and the background in the conditions of different temperature, outgassing time,and after the gas path conversion was measured and caculated. The results show that the oxygen free copper outgassing rate is 3.06×10^-12Pa·m³·s^-1·cm^-2 after 72h baking at 150℃, it indicates that the device has a high test accuracy of outgassing rate which can meet the measurement requirements of synchrotron radiation device for the outgassing rate of ultra-high vacuum materials.

In low temperature storage and transportation, due to the outgassing of materials in the vacuum interlayer, the vacuum degree of the interlayer will decrease, the heat will be introduced from the outside to increase the evaporation rate of the low temperature container and the loss of low temperature liquid, and the vacuum life will be shortened. Therefore, it is very important to study the outgassing properties of materials in vacuum interlayer. In this paper, the outgassing rate of multilayer insulation material and FRP in vacuum for low temperature storage tank is tested and studied. The outgassing rate per unit area of multilayer insulation material and D3848 FRP is 4.93×10^-8Pa·m³/(s·m²) and 1.13×10^-7Pa·m³/(s·m²). The results can provide a reliable basis for the design of adsorption dose of vacuum interlayer.

For the requirement of tritium gas transportation, a set of bellow pump is developed, which includes a boosting pump and a rocking pump. Swashplate-rod with piston structure is developed for the boosting pump, in which three reciprocating plunger pistons are adopted to get high compression ratio to deal with the low vacuum and booster. Rocking piston is adopted in rocking pump to increase the gas flow and decrease the vacuum pressure, which ensure the inlet pressure is 50Pa and outlet pressure is 0.4MPa. Double bellows are used to separate the tritium from the shaft system, which can prevent the transporting gas from any pollution. Helicoflex sealing is used to separate the tritium from the environment, and leaking ratio of 1.0×10^-7Pa·m³/s is achieved. The self developed circulating and boosting pump can meet the request of tritium boosting transportation.

The required vacuum of hemispherical resonator gyro inner cavity was confirmed by theoretic calculation, and the relation of vacuum of the inner cavity with increasing time was found according to the outgassing rate experimental test data. The appropriate getter was chosen, the absorbable capacity of getter was tested, and the equivalent outgassing rate of inner cavity with getter was measured. The test results indicate that the getter can meet the requirement of keeping high vacuum of hemispherical resonator gyro.

The formation mechanism of air hole defects on the surface of superalloy ingots produced by vacuum induction melting process was studied through microstructure observation of the superalloy ingots and thermogravimetric analysis of the attachments in the ingot mold. The results show that during pouring, a small amount of rust(Fe₂O₃) attached to the inner wall of the ingot mold decomposes into Fe₃O₄ under the action of high temperature, during which gas outgassing occurs. The expansion of the generated gas at high temperature is the main reason for the formation of holes on surface of alloy ingot.