集成电路离子注入用低温泵*

doi:10.13385/j.cnki.vacuum.2025.05.09

Abstract

Abstract: Based on the strict requirements of ion implanter for pumping performance and safety protection of cryopump, the main performance index, mechanical structure and electrical system characteristics, application configuration, and unique safety purge sequence of cryopump for ion implantation were introduced. Compared with the cryopump for PVD, the cryopump for ion implantation has a larger diameter and higher requirements for hydrogen pumping speed and capacity. The hydrogen pumping speed and capacity are optimized by the structure design of cold plate and adsorption array. The control system of cryopump for ion implantation has a power switching unit and a backup battery module, and the unique safe purging process ensures that hydrogen can be safely discharged and reduces the risk of explosion.

Key words: integrated circuit, ion implanter, GM refrigerator, cryopump, safety purge

CLC Number: TP23

FENG Xinyu, CHENG Xiang, YANG Yang. Cryopump for Ion Implanter in IC Manufacturing[J].VACUUM, 2025, 62(5): 58-62.

References

[1] 关旭东. 硅集成电路工艺基础[M]. 2版. 北京:北京大学出版社,2014:94.
[2] 佐藤淳一. 图解入门-半导体制造工艺基础精讲 [M]. 4版.王忆文,王姝娅, 译.北京:机械工业出版社,2022:54-55.
[3] 张渊. 半导体制造工艺[M]. 北京:机械工业出版社, 2010:163.
[4] VAN ZAN P.芯片制造-半导体工艺制程实用教程 [M]. 6版. 韩郑生, 译.北京:电子工业出版社, 2015:210.
[5] TAKAHASHI K. Cryopump: US 11644024 B2[P].2023-05-09.
[6] TAKAHASHI K. Cryopump: US 12140129 B2[P].2024-11-12.
[7] MOCHIDZUKI K. Cryopump and regeneration method of cryopump: US 11686300 B2[P].2023-06-27.
[8] YATSU T. Cryopump and regeneration method of cryopump: US 11732703 B2[P].2023-08-22.
[9] SHUHEI G, TAKAHIRO N. Cryopump: US 0392831 A1[P].2023-12-07.
[10] CASELLO J J, MAHONEY P K, SZAREK G M. Cryopump: US 12146480 B2[P].2024-11-19.
[11] SZAREK G M. Cryopanel structure for a cryopump: US 12049882 B2[P].2024-07-30.
[12] CASELLO J. Cyopumps and inlet flow restrictors for cryopumps: US2023/0392838 A1[P].2023-12-07.
[13] BARTLETT A J, SZAREK G M, MAHONEY P K. Cyopump with peripheral first and second stage arrays: US 11466673 B2[P].2022-10-11.
[14] GORDON D, MELKOTE R, LONGLEY A E, et al. Vacuum system with diagnostic circuitry and a method and computer program for monitoring the health of such a vacuum system: US2022/0269257 A1[P]. 2022-08-25.
[15] MICHAEL H, KAMUSELLA S. Cryogenic refrigeration system and cryogenic pump: US 0302088 A1[P].2024-09-12.
[16] 冯欣宇,杨杨. 集成电路制造用制冷机低温泵发展现状[J]. 真空,2022,59(2):42-47.
[17] 莱宝官网[EB/OL]. https://www.leybold.cn.
[18] 爱德华官网[EB/OL]. https://www.edwardsvacuum.cn.
[19] 住友官网[EB/OL]. https://.www.shicryogenics.com.
[20] 武义锋,曾环,王君,等. 大抽速氙气泵优化设计研究[J]. 低温与超导,2024,52(5):95-100.
[21] TAKAHASHI K. Cryopump: US 11512687 B2[P].2022-11-29.
[22] 胡忠军,王炳明,杨伟茂,等. 大型氦气压缩机技术特点和发展趋势[J]. 真空与低温,2020,26(4):270-277.
[23] 胡忠军,吴霞俊,林文剑,等. 大型氦气螺杆压缩机核心技术研究开发与应用[J]. 科学通报,2022,67(21):2482-2491.
[24] 张法轮,袁鉴辞,吕式朋. 飞利浦Ingenia 3.0T磁共振氦气压缩机工作原理与故障维修[J]. 医疗卫生装备,2023,44(10):114-117.
[25] 石玉洋,唐佳丽,李俊杰,等. 氦气压缩机冷却水系统的运行维护及优化潜力分析[J]. 低温工程,2018(3):64-68.
[26] TAKAHASHI K. Cryopump and cryopump regeneration method : US 0200544 A1[P].2024-06-20.
[27] 姜程山. 氢气的爆炸极限抑制研究[D]. 济南:山东建筑大学,2017.

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Cryopump for Ion Implanter in IC Manufacturing

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