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VACUUM ›› 2024, Vol. 61 ›› Issue (4): 42-46.doi: 10.13385/j.cnki.vacuum.2024.04.08

• Vacuum Acquisition System • Previous Articles     Next Articles

Development of KDCP-16 Cryopump with Large Pumping Speed and High Capacity

LU Zheng-yang, GUAN Cheng-hong, YANG Chen, CHEN Jie, LI Yan-feng, DONG Wen-qing   

  1. CSIC Pride Cryogenic Technology Co., Ltd., Nanjing 211100, China
  • Received:2023-08-24 Online:2024-07-25 Published:2024-07-29

Abstract: The large pumping speed and high capacity KDCP-16 cryopump independently developed by CSIC Pride Cryogenic Technology Co., Ltd. is introduced. The pumping speed and thermal load of the cryopump are theoretically calculated. The test methods of the main performance indexes (pumping speed, cool down time, gas capacity, crossover value) of KDCP-16 cryopump are introduced. The results show that the N2 pumping speed of KDCP-16 cryopump is 6 550 L/s, the Ar pumping speed is 5 650 L/s, the cooling time is 110 minutes, the Ar gas capacity is 7 550 std·L, and the crossover value is 6.7×104 Pa·L. The performance index of KDCP-16 cryopump is better than that of foreign cryogenic pumps of the same size.

Key words: cryopump, pumping speed, cool down time, gas capacity, crossover value

CLC Number:  TB752

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