脉管制冷机的研究进展及其仿真优化*

doi:10.13385/j.cnki.vacuum.2024.04.07

Abstract

Abstract: Higher stability, longer operating time and low vibration characteristics of pulse tube cryocooler （PTC） meet the requirements of high vacuum equipment and low-temperature pumps for cold sources, so PTC is increasingly popular in the field of low-temperature vacuum pumps. First, the basic principle and classification of PTC is introduced. And then, the latest development progress of PTC is summarized according to the driving mode. Finally, the advantages and disadvantages of different simulation methods in the development and optimization process are analyzed emphatically.

Key words: cryopump, pulse tube cryocooler, simulation optimization

CLC Number: TB752⁺.53

JIANG Yuan-zhen, DENG Jia-liang, HAN Yu-song, WU Yi-feng. Latest Research Progress and Simulation Optimization of Pulse Tube Cryocooler[J].VACUUM, 2024, 61(4): 35-41.

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Latest Research Progress and Simulation Optimization of Pulse Tube Cryocooler

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