This article briefly introduces the basic principles of relativity and quantum mechanics, which cites the recent scientific news to discuss the application and usage of vacuum science and technology in these fields. As we know(everyone knows, including the content that does not appear in the books), as the mother of the universe, vacuum is bigger and older than the universe. Moreover,vacuum is the physical environment of relativity and quantum mechanics. Vacuum science and technology is an essential theory for the study of relativity and quantum mechanics. The modern physics is on the eve of a great revolution. The research problems of black holes, dark matter, dark energy, gravitational waves and the origin of particles have put forward serious challenges to physics. Perhaps physics can gain ground from studying scientific problems or resolving the contradictions between relativity and quantum mechanics. This article is divided into three parts: (1) The recent progress of relativity and vacuum technology; (2) Previous ideology frames were sorted out; (3) The relevant knowledge of quantum mechanics and zero point energy.

Recently, microarray-structured flexible pressure sensors have attracted extensive attention owing to their controllable shape, small size and high mechanical properties. In addition to the selection of advanced functional materials, the introduction of microarray structures for flexible pressure sensors under traditional working principles is important to further enhance the sensing performance of the device in terms of sensitivity and response time. In this paper, the materials, distribution of microarray, fabrication strategies and sensing characteristics are systematically reviewed. Firstly, the common materials used to fabricate microarray-structured flexible pressure sensors are summarized. Secondly, the different distribution types of the microarray structure are compared. The fabrication strategies are then compared and summarized in detail. Finally, the mechanisms of sensing characteristics of several common-used microarray-structured flexible pressure sensors are mainly discussed. In the future, the force-electric conversion mechanism of the sensor and the stability of the device under multiple environments should be further investigated in order to provide a theoretical basis for the development of flexible pressure sensors with ultra-high sensing performance.

With the rapid evolution of the MEMS and VLSI technologies, small nano-satellite, being low cost and competent in complicated tasks, has become a crucial orientation of the commercial aerospace in the world. The on-orbit maneuverability ability of the small nano-satellite promotes the serial micro-electric propulsion system′s development and on-orbit verification. In this paper, the demands of the electric propulsion system for the small nano-satellite are firstly demonstrated. Then the characteristics of the micro-electric propulsion system are introduced, including the product engineering and on-orbit verification of the micro-electric propulsion system at domestic and overseas. Finally, the development and on-orbit application of the micro-electric propulsion in China are prospected.

Plasma enhanced magnetron sputtering was used to prepare TiCrSiCN and TiCrSiCON nanocomposite coatings on H13 hot working mould steel. Rc indentation method, nanoindentation method, micro-bead blaster, potentiostat were used to detect the adhesion force, toughness, erosion and corrosion resistance of the coatings, respectively. The influences of oxygen addition on the properties of the coatings were emphatically discussed. The results show that the TiCrSiCN and TiCrSiCON nanocomposite coatings have good adhesion to the substrate. The TiCr based nanocomposite coatings could improve the erosion and wear resistance over the uncoated H13 steel by 4~5 times, and the TiCrSiCON coating has better erosion resistance than TiCrSiCN coating. The polarization resistance of TiCrSiCN, TiCrSiCON, and H13 steel decreases sequentially. Oxygen addition is beneficial for improving the adhesion between TiCr based coatings and the substrate, but it will reduce the toughness and the corrosion resistance of the coating.

A new type of continuous strip steel coating equipment is introduced, and the technological process, structure and function of each part of the equipment are designed and analyzed in detail. This equipment fabricates a metal film on the strip steel surface through vacuum evaporation coating process, which can significantly improve the corrosion resistance of the strip steel. The experimental verification shows that this equipment can form a Zn-Mg-Zn composite film with excellent protective properties on the surface of the steel strip.

To solve the problem of low target utilization rate during the use of rectangular magnetron sputtering targets, NAURA designed and fabricated a rectangular planar magnetic control target with dynamic magnetic field whose magnet components can move horizontally and vertically. The equipment drives the magnet assembly to scan along the width direction of the target material through the motor, so that the etching track expands in the width direction on the target surface, the etched area of the target surface increases, and the utilization rate of the target material improves. The vertical height of the magnet assembly is adjusted by the motor to reduce the relative change of the magnetic field intensity on the surface of the target material and to improve the utilization rate of the target material. The test results show that the target utilization rate of the dynamic magnetic field rectangular planar magnetic control target designed and fabricated by NAURA increases to 55%~60%, which greatly reduces the production cost. At present, the equipment has been recognized by industry customers.

For the internal channel surface treatment of quartz and ceramic devices in the field of precision instrument and device manufacturing, RF discharge plasma bombardment cleaning is used. Pollutants are discharged through physical action and chemical reaction to achieve cleaning effect after the surface is bombarded by high-energy plasma. In this work, the process of RF shielding, luminescence adjustment and process parameters exploration during plasma discharge cleaning are explored. The influence of electrode spacing and installation form on luminescence, and the influence of the change of related process parameters on the temperature rise of the device during plasma discharge are studied. The results show that the greater the RF output power and the intake air flow, the faster the workpiece temperature rises. The above results may provide effective guidance for the surface treatment of internal channels in quartz and ceramic devices.

The thermal insulation performance of vacuum glass is closely related to the heat transfer coefficient. However, due to the interference of various uncertain factors such as environmental factors and the heat source temperature of measuring instruments, the thermal conductivity of vacuum glass in industrial circles is difficult to measure, which greatly reduces the production efficiency and production accuracy. By constructing the random forest algorithm model, the heat transfer coefficient of vacuum glass was predicted, and the results were evaluated by mean squared error(MSE). The results show that the MSE is 0.004148, the random forest algorithm is the most suitable algorithm for this experiment, and has a good prediction effect on the heat transfer coefficient of vacuum glass. The effects of environmental factors and dominant factors on the predicted results are obtained through the analysis of characteristic importance. By applying the intelligent algorithm to the production of vacuum glass, the measurement time is shortened from a few hours to 5min.

In this paper, effects of substrate surface roughness, peeling angle and temperatureon the peeling property of graphene films are studied in details by molecular dynamics(MD) simulations. In addition, a theoretical model characterizing the peeling force and the peeling angle ispresented. The results show that the peeling force increases with the increasing surface roughness of the substrate and temperature. Meanwhile, the effect of temperature on the preparation of graphene films by metal assisted stripping is also highlighted, graphene with different layers can be peeled out by adjusting the temperature reasonably. The peeling force gradually decreases when the peeling angle changes from 0° to 90°, which is in consistent with the theoretical prediction. The results can provide a reference for exploring the peeling performance of graphene film from a rough substrate.

In view of the problems of condensation and dripping water and frost on the outside of the interlayer caused by decreasing vacuum degree for the vacuum interlayer of some beamline liquid nitrogen cooling monochromators, and the loss of cooling capacity of the liquid nitrogen pipeline in the Shanghai Synchrotron Radiation Facility, which threaten the operation safety. An automatic pumping system with vacuum feedback and timing start function is designed. Simulation and calculation of the cooling loss under different vacuum degrees of the interlayer help to determine the vacuum degree threshold and other parameters for the system to start. The as-designed pumping system currently works well on beamline liquid nitrogen cooling monochromators, helping to stabilize the beamline operation.

Multi-scale flows are not only used in hypersonic vehicles,orbit change/attitude adjustment of spacecraft and other aerospace fields, but also the scientific and engineering practices such as the mass transfer/heat transfer in micro/nano manufacturing and device. Accurate and rapid simulation of multi-scale flows is of great significance to this kind of scientific research and engineering practice. The discrete ordinates method based on unified gas kinetic scheme is introduced to study the field simulation of multi-scale flows, and the internal flow field simulation of a dynamic gas lock model is completed. The temperature field, velocity field and density field of the model are obtained, and the results are in line with theoretical expectations.

Cool-down time, base pressure, pumping speed and gas capacity are key parameters of cryopump. In this paper systematic measurements and analysis of 200mm diameter ICP200N cryopump with the designed comprehensive performance test platform were carried out. The results show that the cool-down time of ICP200N cryopump is less than 90 minutes. The base pressure can reach the level of 10^-7Pa without baking, and the main residual gas ingredients are water and hydrogen. The testing method of 30s recovery capacity was given, which is very important in the realistic PVD applications. The corresponding capacity for argon and nitrogen is 820L and 590L, respectively. A simple flow calibration device to improve the pumping speed measurement accuracy was also designed, and the test results show that the nitrogen and argon pumping speed of ICP200N cryopump is comparable with that of international mainstream competitor. So far the ICP200N cryopump has been widely used in the PVD equipment of domestic semiconductor production line.

This paper takes the super large vacuum vessel gate with a diameter of 10m as the research object, the design and analysis of the super large vertical vacuum vessel gate are introduced. The strength and deformation of the gate under external pressure and lifting are simulated and analyzed by using the method of reliability design and simulation optimization, and the stiffener arrangement of the gate is optimized according to the analysis results. The research work shows that the problem of local stress overrun of the gate can be effectively reduced by setting a reinforcing plate between head and stiffener at the place where the curvature changes greatly. Reducing the number of head stiffeners to six can reduce the material consumption. In this case, the maximum stress increases to 97.37MPa and the maximum deformation increases to 4.1mm, which can still meet the material use requirements. When lifting, the whole gate bears the gravity load with the maximum deformation of 0.13mm and the maximum stress of 18.6MPa, which can meet the material use requirements.

A special equipment is developed to meet the emission requirements of hydrogen, methane and carbon dioxide wastes and the injection requirements of carbon dioxide into the sealed chamber during the thermal vacuum tests of the environmental control and life support system (ECLSS) of a spacecraft. The equipment adopts a scheme which combines the electric heating belt and the multi-layer insulation materials to keep the pipeline temperature above 12℃. The scheme solves the problem of hydrogen and methane condensation in extreme low temperature conditions and avoids risks of pipe blocking due to carbon dioxide freezing. The scheme also improves the safety level during methane emission via mixing the highly pure nitrogen into methane, solving the safety issue for the emitting methane into vacuum space, since the concentration of methane decreases to within 3.6%, lower than its blasting threshold of 4.4%. Eventually, the stability and the fulfillment of the requirements of the equipment are verified by the practical thermal vacuum tests.

The structural characteristics of a three chamber vertical vacuum induction precision casting furnace is introduced first. Then the overview of other major types of precision casting furnaces are described. Finally, through the comparison of technology and market situation, the current market situation and the future development direction of precision casting furnace are analyzed.

In the vacuum melting casting process of superalloys, the intermediate package system is used to transfer the molten alloy into the ingot mold system. The intermediate package system is typically made of refractory materials. In this paper, the formation mechanism of erosive surface of alumina based refractory was studied by observing the change of surface morphology and Cr layer thickness under different erosion times. The results show that under the action of the superalloy liquid erosion, the cross-section of the refractory produces a zonal Cr layer, and its thickness increases first and then decreases with the increase of the erosion time, and finally tends to be stable. When the erosion time is 145min, the refractory and the superalloy liquid reach a dynamic equilibrium state, and the average thickness of Cr layer is stable at about 400μm.