真空 ›› 2020, Vol. 57 ›› Issue (1): 1-10.doi: 10.13385/j.cnki.vacuum.2020.01.01
• • 下一篇
杨威, 魏贤龙
YANG Wei, WEI Xian-long
摘要： 本文主要回顾总结近数十年来片上电子源的研究工作及最新进展,包括场发射片上电子源、内场发射片上电子源以及新型热发射微型片上电子源。本文从这些片上电子源的基本原理、加工制备以及工作性能(包括工作电压、工作真空、发射电流、发射电流密度和发射效率)等方面进行比较,分析各种片上电子源的优劣点,为片上电子源的发展现状做一个简单的总结。
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