电弧离子镀中Ti大颗粒在空间传输过程中速度和能量变化特征*

doi:10.13385/j.cnki.vacuum.2021.06.09

真空 ›› 2021, Vol. 58 ›› Issue (6): 48-54.doi: 10.13385/j.cnki.vacuum.2021.06.09

电弧离子镀中Ti大颗粒在空间传输过程中速度和能量变化特征^*

魏永强

郑州航空工业管理学院航空宇航学院,河南郑州 450046

收稿日期:2021-04-06 出版日期:2021-11-25 发布日期:2021-11-30
作者简介:魏永强（1980-）,男,河南省长葛市人,博士,副教授。
基金资助:
*国家自然科学基金资助项目（51401182）,河南省高等学校重点科研项目指导计划（22B430030）

Characteristics of Spatial Transmission Velocity and Energy of Ti Macroparticles in Arc Ion Plating Processing

WEI Yong-qiang

School of Aeronautics and Astronautics, Zhengzhou University of Aeronautics, Zhengzhou 450046, China

Received:2021-04-06 Online:2021-11-25 Published:2021-11-30

摘要/Abstract

摘要： 电弧离子镀所制备薄膜中的大颗粒(MPs)缺陷是当前研究热点之一,本文利用尘埃等离子体理论,以Ti大颗粒为研究对象,对Ti大颗粒尺寸与其传输过程中的速度和能量变化进行了计算,解释了大颗粒在薄膜表面形貌变化的主要原因。在电弧等离子体传输过程中,在不同的工作距离下离子和电子的密度发生改变,大颗粒受到等离子体中离子和电子的碰撞,传输速度和能量发生变化,使得大颗粒在到达基体表面时保持半固态和液态。与基体表面发生碰撞后,大颗粒的形貌呈现扁平的椭圆形和长条形。

关键词: 电弧离子镀, 大颗粒, 等离子体, 速度

Abstract: During arc ion plating process, the macroparticle defects are focused in recent years. The relationship between Ti macroparticle size, velocity and energy change in the spatial transmission was calculated, which was used to account for the main change reasons of the macroparticle morphology in the coatings surface. During the transmission process, the density of ions and electrons changed at different working distances. The Ti macroparticles were affected by the collisions of ions and electrons, which caused the velocity and energy changes of Ti macroparticles. The Ti macroparticles remained semi-solid and liquid when reaching the substrate surface. The morphologies of Ti macroparticles showed flat oval and strip after the collision with the substrate surface.

Key words: arc ion plating, macroparticles（MPs）, plasma, velocity

中图分类号:

TB383.2

魏永强. 电弧离子镀中Ti大颗粒在空间传输过程中速度和能量变化特征^*[J]. 真空, 2021, 58(6): 48-54.

WEI Yong-qiang. Characteristics of Spatial Transmission Velocity and Energy of Ti Macroparticles in Arc Ion Plating Processing[J]. VACUUM, 2021, 58(6): 48-54.

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电弧离子镀中Ti大颗粒在空间传输过程中速度和能量变化特征^*

Characteristics of Spatial Transmission Velocity and Energy of Ti Macroparticles in Arc Ion Plating Processing

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