物理气相沉积热障涂层批量生产用球坑仪快速测厚法研究*

doi:10.13385/j.cnki.vacuum.2022.06.13

真空 ›› 2022, Vol. 59 ›› Issue (6): 73-77.doi: 10.13385/j.cnki.vacuum.2022.06.13

物理气相沉积热障涂层批量生产用球坑仪快速测厚法研究^*

邓仲华^1,2, 常振东², 徐雷², 胡江玮¹, 蔡妍², 牟仁德²

1.京东方科技集团股份有限公司,北京 100016;
2.中国航发北京航空材料研究院,北京 100095

收稿日期:2022-04-04 出版日期:2022-11-25 发布日期:2022-12-05
通讯作者: 牟仁德,博士,研究员。
作者简介:邓仲华（1989-）,男,湖北省荆门市人,硕士,高级工程师。
基金资助:
^*国家重大科技专项（J2019-VI-0002-0115）

Research of Quick Measurement for PVD TBCs Thickness in Industrial Production Using Ball Crater Tester

DENG Zhong-hua^1,2, CHANG Zhen-dong², XU Lei², HU Jiang-wei¹, CAI Yan², MU Ren-de²

1. BOE Technology Group Co., Ltd., Beijing 100016, China;
2. AECC, Beijing Institute of Aeronautical Materias, Beijing 100095, China

Received:2022-04-04 Online:2022-11-25 Published:2022-12-05

摘要/Abstract

摘要： 为了满足热障涂层批量生产时对厚度快速、准确检测的需要,本文选用球坑测厚法对物理气相沉积热障涂层厚度进行了测量研究。首先在GH3039高温合金基体上分别制备厚约120μm的NiCrAlYSi涂层和ZrO₂·Y₂O₃（YSZ）涂层,研究了研磨液粒径、研磨时间等参数与磨坑直径的关系,随后根据试验结果对高温合金试片涂覆的NiCrAlYSi/YSZ热障涂层使用球坑测厚法进行了厚度测量,并与金相测厚法结果进行了对比。结果表明：NiCrAlYSi涂层和YSZ涂层磨坑直径与研磨时间均满足抛物线增加关系;相同条件下,所用研磨液粒径为5μm和10μm时获得的磨坑直径相当,均比1μm时的大;针对同一涂层,球坑测厚法与金相测厚法测量结果吻合度高,误差在6%以内。

关键词: 热障涂层, 物理气相沉积, 涂层厚度, 球坑仪

Abstract: In order to test the thickness of thermal barrier coatings quickly and accurately in industrial production, this paper discusses a method of thickness measurement for PVD NiCrAlYSi coating and YSZ coating by using ball crater tester. First, The NiCrAlYSi coating and YSZ coating with thickness of 120μm was deposited on GH3039 superalloy substrate by arc ion plating and EB-PVD respectively. The relationship of particle size in polishing slurry, grinding time and dimension of ball crater was obtained. Then, according to the above experimental results, the thickness of NiCrAlYSi and YSZ coatings on superalloy specimens was measured by ball crater tester, and the results of ball crater tester and metallographical measurement were compared. The results show that the dimension of ball crater has a parabolic relation with milling time for the NiCrAlYSi coating and YSZ coating. Under the same conditions,the dimension of ball crater is the same when the size of particle in polishing slurry is 5μm and 10μm, both of which are much larger than that of the particle size of 1μm. The result of ball crater tester is highly identical with that of metallographical measurement, and the relative error is less than 6%.

Key words: thermal barrier coating, PVD, coating thickness, ball crater tester

中图分类号:

TB44

邓仲华, 常振东, 徐雷, 胡江玮, 蔡妍, 牟仁德. 物理气相沉积热障涂层批量生产用球坑仪快速测厚法研究^*[J]. 真空, 2022, 59(6): 73-77.

DENG Zhong-hua, CHANG Zhen-dong, XU Lei, HU Jiang-wei, CAI Yan, MU Ren-de. Research of Quick Measurement for PVD TBCs Thickness in Industrial Production Using Ball Crater Tester[J]. VACUUM, 2022, 59(6): 73-77.

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物理气相沉积热障涂层批量生产用球坑仪快速测厚法研究^*

Research of Quick Measurement for PVD TBCs Thickness in Industrial Production Using Ball Crater Tester

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