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真空 ›› 2023, Vol. 60 ›› Issue (3): 24-41.doi: 10.13385/j.cnki.vacuum.2023.03.05

• 薄膜 • 上一篇    下一篇

三种溅射深度剖析定量分析模型解析表达式的比较*

钟凤敏1, 王穗鹏1, 郑锦权1, 杨浩1, Siegfried Hofmann1,2, 徐从康1,3, 王江涌1,3   

  1. 1.汕头大学物理系,广东 汕头 515063;
    2.马克斯普朗克智能系统研究所,德国 斯图加特 D-70569;
    3.汕头大学半导体材料与器件研究中心,广东 汕头 515063
  • 收稿日期:2022-11-06 出版日期:2023-05-25 发布日期:2023-05-30
  • 通讯作者: 王江涌,教授;徐从康,教授。
  • 作者简介:钟凤敏（1997-）,女,广东湛江人,硕士。
  • 基金资助:
    *广东省自然科学基金项目（2022A1515010213）; 广东大学重点平台（2021GCZX009）; 广东大学生科技创新培育专项资金资助项目（攀登计划,pdjh2021b0194）

Comparison of the Analytical Expressions of Three Quantitative Sputtering Depth Profiling Models

ZHONG Feng-min1, WANG Sui-peng1, ZHENG Jin-quan1, YANG Hao1, Siegfried Hofmann1,2, XU Cong-kang1,3, WANG Jiang-yong1,3   

  1. 1. Department of Physics, Shantou University, Shantou 515063, China;
    2. Max Planck Institute for Intelligent Systems, Stuttgart D-70569, Germany;
    3. Center of Semiconductor Materials and Devices, Shantou University, Shantou 515063, China
  • Received:2022-11-06 Online:2023-05-25 Published:2023-05-30

摘要： 本文系统地讨论了三种广泛应用于溅射深度剖析定量分析的原子混合-粗糙度-信息深度（MRI）模型、上下坡（UDS）模型与粗糙度-级联混合-反冲注入（RMR）模型的解析表达式。先从定义、公式推导、仿真结果分析三方面逐一分析了这三种模型对应的剖面特征,再通过其对应的深度分辨率子函数、深度分辨率函数、分析膜层厚度的解析表达式以及实验数据的拟合,将三种模型进行了细致的比较。最后解释了上下坡模型存在的不足,纠正了粗糙度-级联混合-反冲注入模型存在的错误描述,实测/模拟深度剖面的动态特性验证了原子混合-粗糙度-信息深度模型的可靠性和优越性。

关键词: 深度剖析定量分析, 原子混合-粗糙度-信息深度模型, 上下坡模型, 粗糙度-级联混合-反冲注入模型, 解析表达式, 动态特性

Abstract: In this paper, the analytical expressions of three widely used quantitative depth profiling models, atomic mixing-roughness-information depth(MRI) model, up-and-down slope(UDS) model and roughness-cascade mixing-recoil implantation(RMR)model are systematically discussed. Firstly, the profile characteristics of the three models are analyzed according to definition, formula derivation and simulation analysis. Then, these models are compared in details with the partial depth resolution functions, the depth resolution function, the analytical expressions of analyzed thick film layer and the fitting of experimental data. Finally, the shortcomings of the UDS model are explained, and the incorrect description of the RMR model are corrected. The reliability and superiority of the MRI model are verified by the dynamic characteristics of measured/simulated depth profile.

Key words: quantitative depth profiling, MRI model, UDS model, RMR model, analytical expression, dynamic characteristic

中图分类号:  TB303

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