真空 ›› 2023, Vol. 60 ›› Issue (6): 9-14.doi: 10.13385/j.cnki.vacuum.2023.06.02
郑一鸣, 王旭迪, 吴俊
ZHENG Yi-ming, WANG Xu-di, WU Jun
摘要: 欧洲计量创新与研究计划(EMPIR)的量子帕斯卡(Quantum Pascal)项目旨在开发基于光子的真空计量标准,以将压力的国际制单位(Pa)转换为气体密度单位。该项目的主要研究方向包括折射率法、吸收光谱法和冷原子法等基于光学方法的量子真空标准,这些方法各有特点,且都具备高精度和高可重复性的优点。其中,折射率法和吸收光谱法主要基于气体分子在真空中的相互作用机制进行测量,而冷原子法则是利用玻色-爱因斯坦凝聚态的性质进行测量。本文对这些原理和应用装置进行了详细介绍,为量子真空计量技术的发展提供了有益的参考。这些技术的发展将有助于实现更准确的真空测量和更精确的科学研究,对于半导体制造、材料科学、量子信息等领域都具有重要意义。
中图分类号: TB771
[1] THAKUR V, YADAV S, KUMAR A.Realization of quantum pascal using natural fundamental physical constants[J]. Mapan, 2020, 35(4): 595-599. [2] 李得天, 成永军, 习振华. 量子真空标准研究进展[J]. 宇航计测技术, 2018, 38(3): 1-15. [3] 习振华, 李得天, 成永军, 等. 光学方法在真空计量中应用研究进展[J]. 真空与低温, 2016, 22(6): 311-318. [4] 许玉蓉, 刘洋洋, 王进, 等. 基于气体折射率方法的真空计量[J]. 物理学报, 2020, 69(15): 250-256. [5] SONG H, KIM J, WOO S.Development of a refractive index measurement system for vacuum pressure measurement[J]. Journal of the Korean Physical Society, 2021, 78(2): 124-129. [6] RICKER J, HENDRICKS J, EGAN P, et al.Towards photonic based pascal realization as a primary pressure standard[J]. Journal of Physics: Conference Series, 2018, 1065(16): 2-6. [7] SILVESTRI Z, BENTOUATI D, OTAL P, et al.Towards an improved helium-based refratometer for pressure measurements[J]. Acta IMEKO, 2021, 9(5): 305-309. [8] 贾文杰, 习振华, 范栋, 等. 基于Fabry-Perot激光谐振腔的量子真空计量技术研究[J]. 光学学报, 2020, 40(22): 149-156. [9] ZAKRISSON J, SILANDER I, FORSSÉN C, et al. Simulation of pressure-induced cavity deformation-the 18SIB04 Quantumpascal EMPIR project[J]. Acta IMEKO, 2021, 9(5): 281-286. [10] SILANDER I, FORSSÉN C, ZAKRISSON J, et al. An invar-based fabry-perot cavity refractometer with a gallium fixed-point cell for assessment of pressure[J]. Acta IMEKO, 2021, 9(5): 293-298. [11] ZELAN M, SILANDER I, FORSSÉN C, et al. Recent advances in fabry-perot-based refractometry utilizing gas modulation for assessment of pressure[J]. Acta IMEKO, 2020, 9(5): 299-304. [12] AXNER O, SILANDER I, FORSSÉN C, et al. Ability of gas modulation to reduce the pickup of fluctuations in refractometry[J]. Journal of the Optical Society of America B, 2020, 37(7): 2419-2436. [13] SILANDER I, HAUSMANINGER T, FORSSÉN C, et al. Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision[J]. Journal of Vacuum Science & Technology B, 2019, 37(4): 042901. [14] SILANDER I, HAUSMANINGER T, ZELAN M, et al. Gas modulation refractometry for high-precision assessment of pressure under non-temperature-stabilized conditions[J]. Journal of Vacuum Science & Technology A, 2018, 36(3): 03E105. [15] FORSSÉN C, SILANDER I, SZABO D, et al. A transportable refractometer for assessment of pressure in the kPa range with ppm level precision[J]. Acta IMEKO, 2020, 9(5): 287-292. [16] 李毅, 李得天, 王多书. 冷原子量子真空计量技术研究进展[J]. 真空与低温, 2019, 25(3): 145-155. [17] MAKHALOV V, MARTIYANOV K, TURLAPOV A.Primary vacuometer based on an ultracold gas in a shallow optical dipole trap[J]. Metrologia, 2016, 53(6): 1287-1294. [18] FEDCHAK J, ABBOTT P, HENDRICKS J, et al.Review article:recommended practice for calibrating vacuum gauges of the ionization type[J]. Journal of Vacuum Science & Technology A, 2018, 36(3): 030802. [19] BAYARD R T, ALPERT D.Extension of the low pressure range of the ionization gauge[J]. Review of Scientific Instruments, 1950, 21(6): 571-572. [20] ECKEL S, BARKER D S, FEDCHAK J A, et al.Challenges to miniaturizing cold atom technology for deployable vacuum metrology[J]. Metrologia, 2018, 55(5): 182-193. [21] LACKNER M.Tunable diode laser absorption spectroscopy(TDLAS) in the process industries-a review[J]. Reviews in Chemical Engineering, 2007, 23(2): 65-147. |
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