类金刚石薄膜抗腐蚀疲劳性能的研究进展*

doi:10.13385/j.cnki.vacuum.2023.06.04

摘要/Abstract

摘要： 类金刚石（DLC）薄膜是一种具有高耐磨性和高化学稳定性的薄膜材料,应用也越来越广泛。随着关键材料部件的服役环境越来越苛刻,关键部件的防护和可靠性面临新的挑战,近年来DLC的抗腐蚀性能越来越被重视。本文聚焦DLC的腐蚀和耐磨机理,归纳了DLC薄膜对合金表面腐蚀防护的研究热点,介绍了应用在材料表面的DLC不同制备方法,简述了单层DLC、多层DLC和掺杂型DLC的结构和防护机理。多层DLC具有很大的研究价值和广泛的应用前景。最后,对当前DLC薄膜对基材表面防护的发展趋势和挑战进行了展望。

关键词: 类金刚石薄膜, 腐蚀疲劳, 掺杂, 多层结构, 杂化键

Abstract: Diamond-like carbon（DLC） film is a kind of film material with high wear resistance and high chemical stability,so it is more and more widely used. With the increasingly harsh service environment of key material components,the protection and reliability of key components are facing new challenges. In recent years,more and more attention has been paid to the corrosion resistance of DLC. This paper focuses on the corrosion and wear resistance mechanism of DLC,and summarizes the research focus of the corrosion resistance of DLC film on alloy surface. Different preparation methods of DLC applied on material surface are introduced. The structure and protection mechanism of single-layer DLC,multi-layer DLC and doped DLC are briefly described. Multilayer DLC has great research value and broad application prospects. Finally,the development trend and challenges of DLC film for substrate surface protection are prospected.

Key words: diamond-like carbon film, corrosion fatigue, doping, multilayered structure, hybrid bond

中图分类号: TG174.444

李国浩, 万亿, 张昕洁, 杜广煜. 类金刚石薄膜抗腐蚀疲劳性能的研究进展^*[J]. 真空, 2023, 60(6): 22-31.

LI Guo-hao, WAN Yi, ZHANG Xin-jie, DU Guang-yu. Research Progress on Corrosion Fatigue Resistance of Diamond-like Carbon Films[J]. VACUUM, 2023, 60(6): 22-31.

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