等离子增强磁控溅射制备TiCr基纳米复合涂层的显微组织和性能

doi:10.13385/j.cnki.vacuum.2024.02.02

摘要/Abstract

摘要： 使用等离子增强磁控溅射技术,利用三甲基硅烷TMS(Si-C)以及六甲基二硅氧烷HMDSO(Si-C-O)气体在H13钢表面制备了TiCrSiCN和TiCrSiCON纳米复合涂层。结合SEM、AFM、XRD、EDS等研究了O元素对涂层显微组织、物相组成、表面能、硬度、摩擦因数、耐磨和耐高温氧化性能的影响。结果表明：与无氧的TiCrSiCN涂层相比,含氧的TiCrSiCON涂层表面较粗糙,致密度低,且存在典型的柱状组织,从而导致其较高的表面能;O元素的加入提高了涂层的硬度,使TiCrSiCON涂层的耐磨性能显著提高,但TiCrSiCN和TiCrSiCON的摩擦因数相差不大;TiCrSiCON涂层中的Cr元素易与O元素结合形成一层致密的氧化膜,从而提高了其耐高温氧化性能。

关键词: 等离子增强磁控溅射, 纳米复合涂层, 显微组织, 摩擦磨损性能, 表面能, 高温氧化性能

Abstract: Plasma enhanced magnetron sputtering (PEMS) method was used to deposit TiCrSiCN and TiCrSiCON nanocomposite coatings using trimethylsilane (Si-C) and hexamethyldisiloxane (Si-C-O) precursors on H13 steel. The influences of oxygen on the microstructure, phases, surface energy, hardness,friction coefficient,wear resistance and high-temperature oxidation properties of the coatings were studied by SEM, AFM, XRD, EDS, etc. The results show that the oxygen-containing TiCrSiCON coating shows a rougher surface with a looser microstructure and typical columnar feature, compared with the oxygen-free TiCrSiCN coating. As a result, the surface energy of the oxygen-containing coating is higher than the oxygen-free coating. The addition of oxygen improves the hardness of the nanocomposite coating, thereby significantly enhancing the anti-wear property of the coating. As for the coefficient of friction, there is no obvious difference between TiCrSiCN and TiCrSiCON coatings. The Cr and O in the TiCrSiCON coating could form a dense oxide film which can improve its high-temperature oxidation property.

Key words: PEMS, nanocomposite coating, microstructure, friction and wear property, surface energy, high-temperature oxidation property

中图分类号: TB331;TB43;O484

李灿民, 董中林, 夏正卫, 张心凤, 魏荣华. 等离子增强磁控溅射制备TiCr基纳米复合涂层的显微组织和性能[J]. 真空, 2024, 61(2): 10-15.

LI Can-min, DONG Zhong-lin, XIA Zheng-wei, ZHANG Xin-feng, WEI Rong-hua. Microstructure and Properties of TiCr-based Nanocomposite Coatings by Plasma Enhanced Magnetron Sputtering[J]. VACUUM, 2024, 61(2): 10-15.

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