薄膜深度剖析定量分析软件的开发*

doi:10.13385/j.cnki.vacuum.2025.01.06

真空 ›› 2025, Vol. 62 ›› Issue (1): 37-43.doi: 10.13385/j.cnki.vacuum.2025.01.06

薄膜深度剖析定量分析软件的开发^*

陆美杰¹, 郑梓宏², 高伟楠², 郑浩梽³, 刘恭文¹, 连松友¹, 徐荣网⁴, 王江涌^1,4

1.汕头大学理学院物理系,广东汕头 515063;
2.汕头大学数学与计算机学院计算机系,广东汕头 515063;
3.汕头大学长江艺术学院艺术设计学系,广东汕头 515063;
4.书豪仪器科技有限公司,江苏昆山 215343

收稿日期:2024-03-07 出版日期:2025-01-25 发布日期:2025-02-10
通讯作者: 连松友,讲师;徐荣网,高级工程师。
作者简介:陆美杰（2004-）,男,广西壮族自治区来宾市人,本科。
基金资助:
* 松山湖材料实验室开发课题（2022SLABFN17）; 广东省大学生创新创业训练计划项目（s202310560096）

Development of Quantitative Analysis Software for Film Depth Profiling

LU Meijie¹, ZHENG Zihong², GAO Weinan², ZHENG Haozhi³, LIU Gongwen¹, LIAN Songyou¹, XU Rongwang⁴, WANG Jiangyong^1,4

1. Department of Physics, College of Science, Shantou University, Shantou 515063, China;
2. Department of Computer Science, School of Mathematics and Computer Science, Shantou University, Shantou 515063, China;
3. Department of Art Design, Cheung Kong Institute of the Arts, Shantou University, Shantou 515063, China;
4. Shuhao Instrument Technology Co., Ltd., Kunshan 215343, China

Received:2024-03-07 Online:2025-01-25 Published:2025-02-10

摘要/Abstract

摘要： 溅射深度剖析技术广泛应用于薄膜材料的元素成分分析中,但溅射过程的复杂性、样品表面形态的多样性等因素都可能对剖析的准确性造成干扰。针对此问题本文首先简要介绍了薄膜深度剖析技术,随后深入讨论了定量分析的物理原理,探讨了为实现高精度测量而对定量分析方法进行的改进和扩展,并开发了一款基于C#语言的深度剖析定量分析软件,详细介绍了软件各模块,最后展示了利用C#语言所编写软件的具体实现。该软件采用MRI模型,集成了深度剖析数据的转换、卷积和反卷积功能,能够对SIMS、AES和XPS等微区分析技术的数据进行定量分析,通过优化算法实现了高精度的深度分辨率函数计算。用户可以通过直观的界面输入实验数据,软件将自动进行数据处理并生成可视化结果。该软件为普通用户提供了一种便捷、高效的工具,显著提升了薄膜深度剖析定量分析的可操作性和准确性。

关键词: 深度剖析, MRI模型, 卷积, 反卷积, 软件

Abstract: Sputter depth profiling has been widely used to characterize the depth distribution of elements in thin films. However, the complex sputtering process involved and the diversity of sample morphology may interfere with the accuracy of analysis. Aiming at the problem, the thin films depth profiling is briefly introduced firstly. Then, the physical backgrounds of the quantitative depth profiling and the expansion for the quantitative analysis of high-resolution depth profiling data are presented. A depth profiling quantitative analysis software based on the C# programming language is developed, the modules of the software is introduced in detail, and the specific implementation of the software written in C# is demonstrated. The software utilizes an MRI model and integrates functions for the transformation, convolution, and deconvolution of in-depth analysis data, which is capable of performing quantitative analysis on data from micro-area analysis techniques such as SIMS, AES, and XPS. Through optimized algorithms, the software achieves high-precision calculation of the depth resolution function. Users can input experimental data through an intuitive interface, and the software will automatically process the data and generate visual results. This software provides a convenient and efficient tool for general users, significantly enhancing the operability and accuracy of thin film depth profiling quantitative analysis.

Key words: quantitative depth profiling, MRI model, convolution, deconvolution, software

中图分类号: O484.2;TP391.9

陆美杰, 郑梓宏, 高伟楠, 郑浩梽, 刘恭文, 连松友, 徐荣网, 王江涌. 薄膜深度剖析定量分析软件的开发^*[J]. 真空, 2025, 62(1): 37-43.

LU Meijie, ZHENG Zihong, GAO Weinan, ZHENG Haozhi, LIU Gongwen, LIAN Songyou, XU Rongwang, WANG Jiangyong. Development of Quantitative Analysis Software for Film Depth Profiling[J]. VACUUM, 2025, 62(1): 37-43.

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薄膜深度剖析定量分析软件的开发^*

Development of Quantitative Analysis Software for Film Depth Profiling

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