真空 ›› 2020, Vol. 57 ›› Issue (5): 24-27.doi: 10.13385/j.cnki.vacuum.2020.05.06
向玉春
XIANG Yu-chun
摘要: 通过脉冲激光沉积的方法在玻璃衬底上制备CuO薄膜,并研究了衬底温度对薄膜结构,光学以及电学性能的影响。结果表明:在不同衬底温度下得到的薄膜均为CuO,并且在红外区域,薄膜的透过率均高于65%。温度升高到300℃,具有较高的结晶质量和红外光透过率,薄膜的电学性能也随之变好,出现最低电阻(2.33×102Ωcm),较高的载流子浓度5.28×10161/cm3。最重要的是在500℃时氧化铜实现了由p型向n型的转变。
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