真空 ›› 2026, Vol. 63 ›› Issue (3): 1-15.doi: 10.13385/j.cnki.vacuum.2026.03.01
• 薄膜 • 下一篇
司慧玲1,2, 罗艳1, 郑龙晖1,2, 王魁波1,2, 吴晓斌1,2
SI Huiling1,2, LUO Yan1, ZHENG Longhui1,2, WANG Kuibo1,2, WU Xiaobin1,2
摘要： 材料在真空环境中的放气行为是高/超高真空系统中主要的气源之一,影响着真空腔室的真空获得时间、极限真空和残余气体组分。真空系统的性能与材料的放气特性密切相关,而这些特性又取决于材料种类、生产工艺、表面状态、微观结构及存在的外部环境等多种因素。本文综述了在真空环境下材料的放气机理、影响因素及测试技术,探讨了在真空器件中广泛应用的表面改性技术对材料放气行为的影响,并对影响机制进行了探究。此外,本文还探讨了高能粒子照射、机械应力、电场等物理场下材料放气行为的变化和影响机制,为真空设备的优化设计和工程应用提供了理论依据和技术参考。
中图分类号: TB74
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