多工位批量产品快速真空检漏设备研制

doi:10.13385/j.cnki.vacuum.2026.05.10

摘要/Abstract

摘要： 为突破半导体领域传统单工位真空检漏设备效率低、自动化程度不足、人员专业依赖性强、不适用于批量生产的瓶颈,研制了多工位批量产品快速真空检漏设备。设备集成了预抽、主抽与氦检三条独立真空通道,通过高精度阀门和高性能真空泵组结合以PLC为核心的电气控制系统,实现了产品从参数设定、过程控制、数据记录到报告生成的全流程自动化检漏。通过系统测试验证了设备的检漏相对误差为6.2%;平均生产节拍为80 s/件,理论产能达90件/h。结果表明,该设备成功实现了高精度、高效率、高可靠性的多工位批量快速检漏。

关键词: 真空检漏, 多工位, 批量检测, 真空系统设计, 自动化检漏系统, 氦质谱检漏

Abstract: This article focuses on the bottleneck of traditional single-station vacuum leak detection equipment in the semiconductor field, which has low efficiency, insufficient automation, strong professional dependence of personnel, and is not suitable for mass production. A multi-station rapid vacuum leak detection equipment for batch products has been developed. The equipment integrates three independent vacuum paths: pre-pumping, main pumping, and helium detection. Through high-precision valves and high-performance vacuum pump units combined with an electrical control system integrated on PLC, it realizes the full process automation of product leakage detection from parameter setting, process control, data recording to report generation. The leak detection accuracy error of the equipment was verified to be 6.2% through system testing. The average production cycle is 80 seconds per piece, with a theoretical production capacity of 90 pieces per hour. The development results indicate that the equipment has successfully achieved high-precision, high-efficiency, and high reliability with multi-station batch rapid leak detection.

Key words: vacuum leak detection, multi-station, batch detection, vacuum system design, automated leak detection system, helium mass spectrometer leak detection

中图分类号: TH69

韩永超, 王鹏, 杜涛, 朱云飞, 袁青山, 卢少波. 多工位批量产品快速真空检漏设备研制[J]. 真空, 2026, 63(5): 68-72.

HAN Yongchao, WANG Peng, DU Tao, ZHU Yunfei, YUAN Qingshan, LU Shaobo. Development of Rapid Multi-station Vacuum Leak Detection Equipment for Batched Products[J]. VACUUM, 2026, 63(5): 68-72.

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