薄壁构件的氦质谱正压-真空检漏试验研究

doi:10.13385/j.cnki.vacuum.2025.01.03

摘要/Abstract

摘要： 对薄壁部件的内部抽真空会引起构件的周向或径向失稳导致构件报废,这是困扰薄壁部件正压定量检漏的难题。本文提出一种对薄壁构件内部充氦气、外部抽真空的正压-真空氦质谱检漏方法。设计了用正压标准漏孔同步比对的定量检漏工装,可进行表压-0.1~0.1 MPa范围的正压-真空氦质谱定量检漏。经过对壁厚0.4 mm的不锈钢薄壁颈管部件的工况压力-真空氦质谱检漏试验,结果表明该方法检漏速度快、效率高,检漏灵敏度符合最小可检漏率要求,能很好地应用于薄壁部件的生产线批量检漏。

关键词: 氦质谱, 检漏方法, 薄壁部件, 正压-真空检漏, 最小可检漏率

Abstract: Internal vacuumization of thin-walled parts may cause circumferential or radial instability of the member and cause the member to be scrapped. This is a difficult problem for positive pressure quantitative leak detection of thin-walled parts. In this paper, a positive pressure-vacuum helium mass spectrometry leak detection method is proposed, which fills helium inside the thin-walled member and vacuumizes it outside. A quantitative leak detection tool with synchronous comparison of positive pressure standard leak holes is designed, which can be used for quantitative leak detection of positive pressure-vacuum helium mass spectrometry in the gauge pressure range of -0.1-0.1 MPa. Through the working condition pressure-vacuum helium mass spectrometry leak detection test on the stainless steel thin-wall neck parts with a wall thickness of 0.4 mm, the results show that the method has fast leak detection speed and high efficiency, and the leak detection sensitivity meets the requirements of minimum detectable rate, which can be well applied to the batch leak detection of thin-wall parts production line.

Key words: helium mass spectrometry, leak detection method, thin-walled component, positive pressure vacuum leak detection, minimum detectable leakage rate

中图分类号: TB774

庞嘉炜, 高建强, 陈光奇, 李杰, 魏裕隆. 薄壁构件的氦质谱正压-真空检漏试验研究[J]. 真空, 2025, 62(1): 15-20.

PANG Jiawei, GAO Jianqiang, CHEN Guangqi, LI Jie, WEI Yulong. Experimental Study on Helium Mass Spectrometry Positive Pressure Vacuum Leak Detection of Thin Wall Components[J]. VACUUM, 2025, 62(1): 15-20.

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