螺旋波等离子体源中离子能量及其诊断*

doi:10.13385/j.cnki.vacuum.2021.04.13

Abstract

Abstract: This article reviews a new type of plasma,helicon plasma, which is characterized by its simple structure and generation of high-density plasma. First, the basic principle of helicon plasma is described briefly, including the helicon plasma source structure, heating mechanism, antenna form and energy coupling mode. Then, the characteristics and diagnosis methods of the helicon plasma are introduced. Among them, the ion energy distribution(IED)by the retarding field energy analyzer(RFEA)is emphasized, and the factors affecting IED value are analyzed. Subsequently, the application progresses of the helicon plasma in the three fields of etching, thin film deposition and electric propulsion are mainly introduced. Finally, the future perspectives of helicon plasma source and some challenges are pointed out.

Key words: helicon wave, structure, principle, ion energy distribution, application progress

CLC Number:

O536

JIANG Kai-yin, YANG Li-zhen, LIU Zhong-wei, ZHANG Hai-bao, CHEN Qiang. Ion Energy and its Diagnosis in Helicon Plasma Source[J].VACUUM, 2021, 58(4): 67-76.

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Ion Energy and its Diagnosis in Helicon Plasma Source

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