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VACUUM ›› 2021, Vol. 58 ›› Issue (5): 32-36.doi: 10.13385/j.cnki.vacuum.2021.05.04

• Vacuum Acquisition System • Previous Articles     Next Articles

Design and Research on the Vacuum System of Material Sputtering Experimental Device for the Fusion First Wall Material

WANG Jun-ru1,2, YU Yao-wei1, CAO Bin1, ZHUANG Hui-dong1, HU Jian-sheng1   

  1. 1. Institute of Plasma Physics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, efei 230031, China;
    2. University of Science and Technology of China, Hefei 230026, China
  • Received:2020-09-27 Online:2021-09-25 Published:2021-09-23

Abstract: Linear plasma device(LPD) is an important platform for studying plasma and wall material interaction. It was presented that the design and test of vacuum system for a new LPD device, called material sputtering experimental device(MSED). The vacuum vessel is divided into two parts of plasma discharge vessel and material pretreatment vessel. The related experiments could be carried out in their own vessel without affecting each other. The test experiment is carried out by the new vacuum control system. The results show that the limit vacuum is 1.4×10-5 Pa after a baking cycle, which meets the design requirements. The material samples could be transferred with the maximum distance of ~ 1800 mm. The stable and reliable operation of the vacuum system is benefit to the achievement of ultra-clean vacuum.

Key words: material sputtering experimental device, material exposure, vacuum system, pumping speed

CLC Number: 

  • TL62+8
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