一种小型真空弧离子源的触发放电结构优化研究*

doi:10.13385/j.cnki.vacuum.2022.02.03

Abstract

Abstract: On the research of a small triggered vacuum arc ion source, the trigger process is very crucial to the following processes such as arcing and extraction. The traditional trigger structure is a sandwich structure including trigger, insulator and cathode. The triggering process is the surface discharge process on the insulator surface. It needs a very rigorous condition to realize stable triggering discharge for this structure. Optimizing the trigger structure can effectively improve the stability of the ion source and reduce the cost and ability of the power source. Therefore, we propose a new trigger structure in this paper, which also demonstrates the stability of triggering discharge.

Key words: surface flashover, triggered vacuum arc ion source, triggering discharge

CLC Number:

O462.4

HU Sheng, YU Jie, WANG Liang, LI Gang. The Optimization Study of the Trigger Structure of a Small Vacuum Arc Ion Source[J].VACUUM, 2022, 59(2): 11-16.

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The Optimization Study of the Trigger Structure of a Small Vacuum Arc Ion Source

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