分子泵体积流率检测标准方法的探讨

doi:10.13385/j.cnki.vacuum.2024.04.11

Abstract

Abstract: The development of molecular pumps, detection methods and applications of volume flow rate are comprehensively discussed. The domestic and international standards for volume flow rate measurement of molecular pumps are introduced, and two volume flow rate test methods, the flow method and the orifice method are focuses on. Taking the FF-160/620C molecular pump as the object, the volume flow rate under specific pressure is measured by the two methods respectively. The principle, process, results and uncertainty are introduced in detail. It is concluded that the flow method has greater advantages when the flowmeter meets the requirements. Finally, the measurement methods and significance of molecular pumps in special working conditions, such as strong magnetic and corrosion-resistant environments, are introduced.

Key words: molecular pump, volume flow rate, flow method, orifice method

CLC Number: TB752

QIAO Zhong-lu, WANG Ling-ling, LI Zhi-hui, LIU Shi-meng, SONG Qing-zhu, ZHAN Chun-ming. Discussion on the Standard Method for Detecting Volume Flow Rate of Molecular Pump[J].VACUUM, 2024, 61(4): 58-64.

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Discussion on the Standard Method for Detecting Volume Flow Rate of Molecular Pump

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