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VACUUM ›› 2024, Vol. 61 ›› Issue (4): 102-104.doi: 10.13385/j.cnki.vacuum.2024.04.19

• Lectures on Vacuum Technology and Its Application • Previous Articles     Next Articles

No. 22:Chemical Vapor Deposition Technology

ZHANG Yi-chen   

  • Online:2024-07-25 Published:2024-07-29

CLC Number:  O484;TB43

[1] BAI Hao-yu, YAO Chun-long, DONG Ming, QIN Rui, BAI Yong-hao, WANG Yi-nan. Development of Ultra-High Steepness Edge Long Wave Pass Raman Filter [J]. VACUUM, 2024, 61(4): 12-16.
[2] LI Rui-dong, JIN Da-li, ZHANG Mei-dong, YU Li-ping, WANG Jian-wei. Effect of Different Experimental Conditions on Charge Carrier Mobility of α-Se Films [J]. VACUUM, 2024, 61(4): 17-21.
[3] LI Can-min, DONG Zhong-lin, XIA Zheng-wei, ZHANG Xin-feng, WEI Rong-hua. Microstructure and Properties of TiCr-based Nanocomposite Coatings by Plasma Enhanced Magnetron Sputtering [J]. VACUUM, 2024, 61(2): 10-15.
[4] . [J]. VACUUM, 2024, 61(2): 86-88.
[5] . [J]. VACUUM, 2024, 61(1): 87-88.
[6] WU Xiao-hu, HU Shu-jie, SUN En-ze, ZHANG Xin, ZHAO Qi. Performance Regulation Approach of Fluorinated Amorphous Carbon Film for Large-space Building [J]. VACUUM, 2023, 60(6): 42-46.
[7] ZHANG Yi-chen. No. 22：Chemical Vapor Deposition Technology [J]. VACUUM, 2023, 60(6): 87-88.
[8] . [J]. VACUUM, 2023, 60(5): 102-104.
[9] . [J]. VACUUM, 2023, 60(4): 85-88.
[10] YU Kang-yuan, HE Yu-dan, YANG Bo, LUO Jiang-shan. Effect of Sputtering Voltage on Microstructure and Properties of Cu Foils Deposited by High Power Impulse Magnetron Sputtering [J]. VACUUM, 2023, 60(3): 1-4.
[11] ZHU Jian-hua, PAN Jing, YUE Jian-ming, HAO Li-ping, ZHI Peng-wei, JIA Zhe. Structure and Luminescence Properties of Zn1-xSbxO Films Grown at Different Temperatures [J]. VACUUM, 2023, 60(3): 18-23.
[12] XIANG Yu-chun, ZHU Jian-lei, YUAN Ya. Effect of Oxygen Pressure on the Properties of CuO Films Grown by Pulse Laser Deposition [J]. VACUUM, 2023, 60(3): 42-45.
[13] . [J]. VACUUM, 2023, 60(3): 86-88.
[14] ZHANG Han-yan, ZHENG Dan-xu, SHEN Yi, CHEN Yu-yun. Research of Insulation of Silicon Oxide Film Produced by Medium Frequency Magnetron Sputtering [J]. VACUUM, 2023, 60(2): 34-38.
[15] . [J]. VACUUM, 2023, 60(2): 86-88.
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