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VACUUM ›› 2024, Vol. 61 ›› Issue (4): 12-16.doi: 10.13385/j.cnki.vacuum.2024.04.03

• Thin Film • Previous Articles     Next Articles

Development of Ultra-High Steepness Edge Long Wave Pass Raman Filter

BAI Hao-yu, YAO Chun-long, DONG Ming, QIN Rui, BAI Yong-hao, WANG Yi-nan   

  1. Shenyang Academy of Instrumentation Science Co., Ltd., Shenyang 110043, China
  • Received:2023-10-23 Online:2024-07-25 Published:2024-07-29

Abstract: Long wave pass filters are important optical components in Raman spectrometers that filter out Rayleigh scattering light, and higher steepness can further improve their detection accuracy and range. The design scheme of ultra-high steepness long wave pass film system and high-precision film thickness control technology of ultra-multiple film layers were introduced. The ultra-high steepness long wave pass film product manufacturing was achieved based on magnetron sputtering technology. The test results show that product has a steepness of better than 0.5% and a passband ripple of better than 4%, which can achieve a minimum of 100 cm-1 low wavenumber Raman detection near 532 nm laser.

Key words: long wave pass filter, steepness, magnetron sputtering, raman detection

CLC Number:  O484.4+1

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