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VACUUM ›› 2022, Vol. 59 ›› Issue (2): 42-47.doi: 10.13385/j.cnki.vacuum.2022.02.09

• Vacuum Acquisition System • Previous Articles     Next Articles

Current Status of Refrigerator Cryopump for IC Manufacturing

FENG Xin-yu1,2, YANG yang1   

  1. 1. Vacree Technologies Co., Ltd., Hefei 230088, China;
    2. The 16th Research Institute of China Electronics Technology Group Corporation, Hefei 230088, China
  • Received:2021-02-07 Online:2022-03-25 Published:2022-04-14

Abstract: The cryopump with GM refrigerator as the core component is a kind of ultra-high vacuum acquisition equipment. Owing to its characteristics and advantages, it has been widely used in integrated circuit manufacturing processes and equipment. In recent years, with the rapid development of China′s integrated circuit manufacturing equipment and complete sets of technology, the demand for cryopumps as important components is also increasing. The technical development status of imported cryopump products in domestic integrated circuit manufacturing is introduced, and the technical characteristics of different products are compared. The history and current situation of domestic cryopumps entering the integrated circuit manufacturing industry are described.

Key words: integrated circuit, cryopump, development status

CLC Number: 

  • TP23
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