VACUUM ›› 2025, Vol. 62 ›› Issue (5): 39-43.doi: 10.13385/j.cnki.vacuum.2025.05.06
• Thin Film • Previous Articles Next Articles
GUO Maomao1, XIE Min1, WANG Zhigang1, MU Rende1,2, SONG Xiwen1,3, ZHANG Yonghe1
CLC Number: TQ174.75;TB3
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