VACUUM ›› 2023, Vol. 60 ›› Issue (2): 30-33.doi: 10.13385/j.cnki.vacuum.2023.02.05
• Thin Film • Previous Articles Next Articles
ZHAO Wen-jun1,2, LIU Yu-zhuo1,2, CAI Yan1,2, WANG Li-zhe1,2, LI Jian-ping1,2, MU Ren-de1,2, HE Li-min1,2
CLC Number:
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