Copper(Cu) foils were deposited by high power impulse magnetron sputtering(HiPIMS) method. The effects of sputtering voltage on the microstructure and properties of the Cu foils were investigated. The results show that the Cu foils deposited with the sputtering voltages of 700-950V present (111) crystal preferred orientation obviously, their grain sizes are between 27.7nm and 36.5nm, and the relative densities are between 96.1% and 98.5%, which is distinctly superior to that of the Cu foils prepared by ordinary DC magnetron sputtering. With the increase of sputtering voltage, the Cu foil gradually changes from ductility to brittleness, and the resistivity gradually decreases to 2.38μΩ·cm, which is close to the solid-state resistivity of pure Cu.

The NiCrAlYSi (HY3) metal-bonded layer was prepared on the DZ125 alloy substrate by vacuum arc plating (ARC), and then the yttrium oxide stabilized zirconia(6-8YSZ) ceramic coatings were deposited by electron beam physical vapor deposition(EB-PVD) at five incidence angles of 0°, 20°, 40°, 60°, and 80°, respectively. The effect of incident angle on the morphology and properties of the coating was studied. The results show that the thermal barrier coatings with five incidence angles can form columnar crystal structure, and the porosity and columnar crystal tilt angle gradually increase with increasing incidence angles, while the coating thickness gradually decreases. The bonding strength of the coated specimens was tested, and the bonding strength is above 55MPa at the incidence angles of 0° to 40°, and decreases to 15.7MPa when the incidence angle increasing to 80°. Under the thermal shock conditions, TGO is formed between the ceramic surface layer and the substrate.The porosity of the coating is different at different incidence angles, and the growth rate of TGO is inconsistent, resulting in significant differences in the thermal shock life. The thermal shock life of the coating at the incidence angles of 0° to 40° exceeds 4000 times, while that of the coating at the incidence angle of 60° is 3371 times and the shortest one at the incidence angle of 80° is only 1836 times.

Vacuum coating is a green manufacturing technology which can prepare high performance coating material and high quality surface under vacuum environment. At present, the hard coating series products which is majorly prepared by physical vapor deposition technology can help the manufacturing industry to achieve low-carbon manufacturing and sustainable development. In the process of vacuum coating application, tribology and surface interface are important scientific issues, while key technical problems need to be solved for advanced vacuum coating equipment, such as high-end core parts, coating process and control system, in particular to the initiative into the fourth tide of the industrial revolution as well as exploring the road of the digital revolution. This paper introduces the specific path of vacuum coating to help low-carbon manufacturing and sustainable development. In addition to mature markets such as tool industry and automobile industry, vacuum coating can also provide important support for the innovation and development of medical industry, aerospace and semiconductor industry.

Sb-doped ZnO targets with different ratios were prepared by solid-state reaction, and Zn_1-xSb_xO thin films were prepared on Si(100) substrate by pulsed laser deposition(PLD) method. The structure and properties of the films were characterized by XRD and photoluminescence(PL), and the effects of Sb doping concentration and growth temperature on the crystalline quality and luminescence properties of the films were investigated. The results show that compared with the PL spectra of pure ZnO, it is found that the ZnSbO film exhibit UV peaks,and the intensity of all emission peaks increase relatively with the increasing of Sb concentration. For Zn_0.98Sb_0.02O thin films, the UV and blue light emission intensities of the films are changed by different substrate growth temperatures, and the film has the best crystallization quality and the strongest emission front at 500℃. For Zn_0.98Sb_0.02O thin film grown at 500℃,When the wavelength of the excitation light source changes from 325nm to 300nm, the peak position shifts red and the intensity ratio of UV peak to blue front changed from 1∶3 to 12∶1. According to the experimental results, light-emitting devices with different wavelength and different intensity can be prepared through changing the doping concentration of Sb, the growth temperature, and the length of the excitation light source.

In this paper, the analytical expressions of three widely used quantitative depth profiling models, atomic mixing-roughness-information depth(MRI) model, up-and-down slope(UDS) model and roughness-cascade mixing-recoil implantation(RMR)model are systematically discussed. Firstly, the profile characteristics of the three models are analyzed according to definition, formula derivation and simulation analysis. Then, these models are compared in details with the partial depth resolution functions, the depth resolution function, the analytical expressions of analyzed thick film layer and the fitting of experimental data. Finally, the shortcomings of the UDS model are explained, and the incorrect description of the RMR model are corrected. The reliability and superiority of the MRI model are verified by the dynamic characteristics of measured/simulated depth profile.

The effect of oxygen pressure on the structure and photoelectric properties of CuO thin films deposited by pulsed laser deposition(PLD) on glass substrates was studied. The test results show that the film deposited at 3×10^-3Pa, 3-5Pa, and 8-12Pa show single Cu₂O phase, mixed Cu₂O/CuO phase and single CuO phase, respectively. The orientation of CuO films changes from(111) to(002) when the oxygen pressure increases from 5Pa to 8Pa. The hall test results show that CuO film deposited at 3-5Pa is p-type, while the CuO film deposited at 8-12Pa is n-type, and the resistivity is the lowest and the carrier concentration is the highest when the oxygen pressure is 5Pa.

The screw dry vacuum pump realizes multi-stage compression in one pump chamber and does not use liquid sealing, it is an excellent equipment for gas transportation under the "dual carbon" target. The article analyzes the design principles of screw dry vacuum pumps. The characteristics and requirements of screw vacuum pump in use scenarios are studied, and the particularity of vacuum system in chemical engineering is pointed out. The scene based module system integration, screw pump sealing structure, internal cooling structure and intelligent control are proposed. The database establishment and control mode optimization measures that need to be addressed in the intelligent process are discussed. It is recommended to use scenario requirements as the design principle based on theoretical design to achieve safe and efficient engineering application.

Mechanical vacuum pump system has gradually replaced the steam vacuum pump system in the field of steel refining, and a reasonable and efficient dust removal system is a necessary measure to ensure the normal operation of the mechanical vacuum pump system. This paper introduces the design and working principle of mechanical vacuum pump dust removal system, and analyzes the common problems and causes of dust removal system. Combined with the relevant engineering practical experience, the dust removal system is optimized and improved, including two-stage gas cooling system, automatic pulse purge system, automatic dust transferring system, and waste gas monitoring and alarm system. The optimized and improved dust removal system has been continuously operated in the RH vacuum refining furnace project of a new electric furnace steel-making plant for more than one year, effectively protecting the operation of mechanical vacuum pump and meeting the production process requirements for RH vacuum refining furnace.

The drift tube linac(DTL) is the main part of CSNS linac, which is responsible for accelerating the negative hydrogen ion beam with a pulse current of 15mA from 3MeV to 80MeV, and then injecting it into the fast cycle synchrotron(RCS) for further acceleration. In order to avoid energy loss, ion beam acceleration must be completed in a high vacuum environment.This paper first introduces the composition of the DTL tank vacuum system, and then analyzes the current vacuum leakage, describes in detail the vacuum leakage solutions in different situations such as pickup leakage, drift tube leakage(including water leakage, air leakage, internal leakage), and reduces the leak detection area by simulation calculation by Monte Carlo method. Due to the high leakage frequency of drift tubes, this paper gives a standardized operating procedure for drift tube leakage to improve leak detection efficiency.

The measurement of secondary electron emission coefficient is very important for the development of vacuum electronic devices. To measure the secondary electron emission coefficient of materials with low electrical conductivity, it is necessary to design a high performance electron gun with adjustable energy, beam spot diameter, deflection and pulse. According to the performance index of the electron gun, its electron emission, electron optical system and potential relationship are preliminarily designed. The pulse emission of electron beam was realized by applying pulse voltage to the control pole. The CST software was used to model and simulate the electron gun, the influence of focusing pole voltage on the beam spot size was obtained, and the effect of the deflector electrode was simulated. The results show that when the cathode voltage is -1000V, the control electrode voltage is -1005V, and the first anode voltage is -880V, as the focusing voltage increases from -400V to 1000V, the beam spot diameter increases from 0.2mm to 10mm, the relationship between them is almost directly proportional. The quadrupole electrostatic deflector is more suitable for use in the same space by comparing two deflection components. When the working distance is 30mm and the deflection voltage is 200V, the deflection sensitivity can reach 34mm/kV and the corresponding deflection angle is 12.8°. The design of the electron gun is reasonable and meets the requirements of the index, it can be used to measure the secondary electron launcher.

The electric propulsion technology is an important propulsion system technology for Chinese satellites in the future. It has the advantages of higher specific impulse, lower thrust and higher propellant utilization compared to the conventional chemical propulsion. The ion thrusters mainly use xenon as propellant. Helium is used as the leakage gas in the conventional sealing test of the propulsion system. There is a conversion relationship between the leakage detection result and the actual leakage rate of the xenon. In order to accurately evaluate the actual leakage state and leakage rate of the electric propulsion system, it is urgent to carry out relevant research. In this paper, the feasibility of xenon in-situ leak detection technology is verified by building a several tracer gases testing system. Through theoretical analysis and experimental research, the leak rate conversion relationship between xenon, helium and krypton, as well as the theoretical upper and lower limits of the conversion coefficient, are preliminarily obtained. It will provide a reference for the leak detection of the electric propulsion system.

Tungsten, molybdenum, rhenium and other refractory metal parts, often used in the power source for maintaining the operation of space orbiting satellites and space stations, such as nuclear power and electric propulsion. Most of these components work in ultra-high vacuum environment, accompanied by high temperature, radiation and particle irradiation, and other extremely harsh environmental conditions. Based on the structural characteristics of most components, and the shape,dimensional accuracy, coating composition and structural stability of the materials and components need to be protected, related vacuum process equipment is designed to be well structure with suspended workpieces. This paper introduces the development of a vacuum brazing equipment for the manufacture of nuclear power components in detail. It is a special "deep well" structure with upper discharge. An innovative and optimized design in reliability, operability and security was carried out. The test results show that the thermal (1600℃) vacuum degree of the equipment reached 3×10^-4Pa, and the temperature uniformity reached ±4℃.

Vacuum arc skull furnace is a special material casting equipment. In the process of centrifugal casting, it may be affected by periodic excitation force and vibration of external equipment, which will induce resonance of its own shell. In consequence, shell resonancereduces the casting quality and formssecurity risk. In this paper, the modal analysis of avacuum arc furnace is carried out, and it is found that the local design deficiency is the cause of the low-order local mode. By reinforcing the structure, the first-order mode frequency is increased from 56.786Hz (close to the power frequency) to 77.610Hz(relatively safe), and the amplitude is reduced from 3.540mm to 0.323mm. In conclusion, modal shape optimization method has achieved a good effect of vibration reduction design.

The interface reaction between a Zr containing superalloy and different crucible refractory materials was investigated by dross test, scanning electron microscope(SEM) and energy dispersive spectroscopy(EDS). The results show that the ZrO₂ produced by the reaction between Zr in superalloy and oxide ceramic crucible is the main source of dross in alloy ingot. The thermodynamic stability of MgO crucible is lower than that of Al₂O₃ crucible, and its reaction with Zr is more intense, resulting in more ZrO₂ dross. The microstructure of crucible also has an important influence on the interfacial reaction. When the density of the crucible is high and the surface is smooth, the generated ZrO₂ is attached to the crucible surface to form a dense ZrO₂ layer, which prevents the further reaction between Zr and Al₂O₃ crucible. When the surface of the crucible is rough, it is difficult to form a dense ZrO₂ layer, and the generated ZrO₂ enters the alloy melt to form dross. Therefore, the use of Al₂O₃ crucible with high density, fine structure and good surface quality is conducive to reduce the reaction between superalloy and crucible refractory, and reduce the pollution of alloy ingot.