VACUUM ›› 2023, Vol. 60 ›› Issue (4): 8-12.doi: 10.13385/j.cnki.vacuum.2023.04.02
• Thin Film • Previous Articles Next Articles
ZHANG Yan-peng, CAO Zhi-qiang, FU Qiang, CAO Lei, LIU Xu
CLC Number: TB43
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