新型碳纳米管微焦点电子源研究*

doi:10.13385/j.cnki.vacuum.2022.01.09

摘要/Abstract

摘要： 介绍了一种基于碳纳米管场发射的新型微焦点电子源技术。利用激光烧蚀镍金属表面使内部未氧化的镍金属熔化喷出暴露于基底表面,再通过化学气相沉积制备出直径约为350μm的半球壳型碳纳米管薄膜阴极。场发射测试表明,电子源具有低开启电场（<1V/μm）、高发射电流（可达1A/cm²）和高压强发射稳定等特点。通过复合石墨烯和750℃真空高温退火,高压强发射稳定性得到进一步提高。该工作提供了一种制备强流微尺度场发射阴极的有效途径。

关键词: 场发射电子源, 化学气相沉积, 多壁碳纳米管, 石墨烯, 激光烧蚀

Abstract: A new type of micro-focus electron source based on carbon nanotube field emission is developed. Laser ablation of the nickel substrate would melt the metal and spray the unoxidized metal inside to expose to the surface to form a hemispherical shell with a diameter of about 350μm,on which the carbon nanotube film is grown by the direct chemical vapor deposition technique. The micro-dimension electron source shows good field emission characteristic performances including low turn-on electric field（<1V/μm）, high emission current（up to 1A/cm²）, and stable high pressure emission stability. After addition of graphene materials and 750℃ annealing, the high-pressure emission stability is further improved. This work may provide an effective approach to prepare high-current micro-scale field emission cathodes.

Key words: field emission electron source, chemical vapor deposition, multi-walled carbon nanotubes, graphene, laser ablation

中图分类号:

TB383

祝维, 陆群旭, 钱维金, 黄卫军, 董长昆. 新型碳纳米管微焦点电子源研究^*[J]. 真空, 2022, 59(1): 48-53.

ZHU Wei, LU Qun-xu, QIAN Wei-jin, HUANG Wei-jun, DONG Chang-kun. Study on a Novel Micro-Focus Electron Source for Carbon Nanotubes[J]. VACUUM, 2022, 59(1): 48-53.

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