Zr/ZrVFe多孔吸气材料的表面改性研究

doi:10.13385/j.cnki.vacuum.2022.06.03

真空 ›› 2022, Vol. 59 ›› Issue (6): 17-21.doi: 10.13385/j.cnki.vacuum.2022.06.03

Zr/ZrVFe多孔吸气材料的表面改性研究

孙雯君^1,2, 冯欣格¹, 宋伊², 裴晓强², 吴成耀²

1.兰州大学物理科学与技术学院,甘肃兰州 730000;
2.兰州空间技术物理研究所真空技术与物理重点实验室,甘肃兰州 730000

收稿日期:2022-02-09 出版日期:2022-11-25 发布日期:2022-12-05
作者简介:孙雯君（1985-）,女,宁夏吴忠人,高级工程师。

Study on Surface Modification of Zr/ZrVFe Porous Getter Material

SUN Wen-jun^1,2, FENG Xin-ge¹, SONG Yi², PEI Xiao-qiang², WU Cheng-yao²

1. School of Physical Science and Technology, Lanzhou University, Lanzhou 730000, China;
2. Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China

Received:2022-02-09 Online:2022-11-25 Published:2022-12-05

摘要/Abstract

摘要： 采用磁控溅射技术在Zr/ZrVFe多孔吸气剂表面制备不同厚度的Ni膜,研究了Ni膜对吸气剂吸气性能的影响,利用SEM和EDS技术分析了吸气剂表面形貌及元素组成,通过定容法研究了吸气剂室温吸气性能。结果表明：吸气剂激活过程中,H₂O、CO₂和CO/N₂在350℃以下就已脱附;当激活温度达到350~450℃时,脱附气体只剩H₂和CH₄,CH₄为吸气剂脱附产生的H₂与四极质谱计灯丝发生反应所得;制备的Ni膜均匀覆盖在吸气剂表面,不会改变吸气剂的表面形貌;进行Ni膜表面改性后,吸气剂的吸气容量明显增大,且镀膜2h所得吸气剂的平衡压最小,吸附性能最好。

关键词: Zr/ZrVFe, 多孔吸气材料, 表面改性, Ni膜

Abstract: Ni films with different thickness were prepared on the surface of Zr/ZrVFe porous getter by magnetron sputtering technology. The influence of Ni films on the gettering performance of the getter was studied. The surface morphology and elemental composition of getter were analyzed by SEM and EDS technology,and the gettering performance at room temperature was studied by constant volume method. The results show that during the getter activation process, H₂O, CO₂ and CO/N₂ have been desorbed below 350℃. When the activation temperature reaches 350-450℃, only H₂ and CH₄ remain in the desorption gas,and CH₄ is obtained by the reaction between the H₂ and the filament of the four-stage mass spectrometer. The as-prepared Ni film uniformly covers the getter surface without changing the getter surface morphology. The surface modification of getter by Ni film obviously increases the getter capacity. The equilibrium pressure of getter obtained by coating for 2h is the smallest and the adsorption performance is the best.

Key words: Zr/ZrVFe, porous getter, surface modification, Ni film

中图分类号:

TB741

孙雯君, 冯欣格, 宋伊, 裴晓强, 吴成耀. Zr/ZrVFe多孔吸气材料的表面改性研究[J]. 真空, 2022, 59(6): 17-21.

SUN Wen-jun, FENG Xin-ge, SONG Yi, PEI Xiao-qiang, WU Cheng-yao. Study on Surface Modification of Zr/ZrVFe Porous Getter Material[J]. VACUUM, 2022, 59(6): 17-21.

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Zr/ZrVFe多孔吸气材料的表面改性研究

Study on Surface Modification of Zr/ZrVFe Porous Getter Material

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