真空 ›› 2024, Vol. 61 ›› Issue (1): 1-9.doi: 10.13385/j.cnki.vacuum.2024.01.01
• 薄膜 • 下一篇
武洪臣, 杨丽媛
WU Hong-chen, YANG Li-yuan
摘要: 阴极弧(Cathodic Arcs)是目前多种薄膜及涂层制备工艺的重要物质来源。从阴极表面起弧形成阴极斑点、产生等离子体(相变)、等离子体在真空室中的扩展(输运),到最终在施加偏压的基体上沉积、凝聚形成涂层或薄膜,这一系列环节包含着复杂的物理过程。对这些过程及相关机制的深入分析与认识,无疑会对涂层制备工艺起到重要的理论指导作用。本文简要回顾了人类对阴极弧有关的放电现象的认识过程以及相关涂层的发展历史。对阴极放电机制以及与涂层工艺密切相关的等离子体行为,诸如脉冲阴极弧等离子体速度、鞘层、斜入射与附着系数等问题进行了探讨与实验结果的汇总。旨在为读者对阴极弧及其涂层工艺提供感性认识,为指导科研生产实践服务。
中图分类号: O539;TB43
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