真空 ›› 2021, Vol. 58 ›› Issue (4): 67-76.doi: 10.13385/j.cnki.vacuum.2021.04.13
姜开银, 杨丽珍, 刘忠伟, 张海宝, 陈强
JIANG Kai-yin, YANG Li-zhen, LIU Zhong-wei, ZHANG Hai-bao, CHEN Qiang
摘要： 介绍了一种具有广泛应用前景的新型等离子体源—螺旋波等离子体源,其特点是结构简单,可以产生高密度的等离子体。论文首先简述了螺旋波等离子体产生基本原理,并对螺旋波等离子体源的结构、加热机制以及天线形式与其能量耦合方式进行了介绍。然后,概述了螺旋波等离子体源的特性和诊断方式,主要介绍迟滞能量分析仪（RFEA）对螺旋波等离子体中的离子能量分布（IED）诊断,并对影响IED的因素进行分析。随后介绍了螺旋波等离子体源在刻蚀、薄膜沉积以及电推进三个领域的应用进展。最后指出螺旋波等离子体源的未来发展以及存在的一些问题。
中图分类号:
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