TiB2-BN复相陶瓷腐蚀特征与界面失效机理探索*

doi:10.13385/j.cnki.vacuum.2026.03.03

摘要/Abstract

摘要： 核心蒸发元件陶瓷蒸发舟的寿命限制,导致真空连续蒸镀技术在复合集流体行业应用仍然受限,针对TiB₂-BN复相陶瓷体系,基于不同组分构成,系统开展其腐蚀行为的差异化分析,深入探究各组分对材料腐蚀过程、腐蚀机制及腐蚀性能的影响规律。对复合集流体用蒸发舟的腐蚀过程进行跟踪,利用XRD、SEM等技术对腐蚀过程的微区成分、结构变化进行了表征,并对蒸发舟表面不同腐蚀区域进行成分分析,确认TiB₂-BN陶瓷蒸发舟失效机制为表面BN成分消耗,腐蚀产物为AlN,覆盖在舟体表面,铝液滴落位置形成团聚AlN;TiB₂颗粒呈层片状剥蚀,聚集在蒸发舟边缘,TiB₂作为导电相导致局部电阻降低,引起局部电流增加、热量集中进而造成铝液飞溅。

关键词: 导电陶瓷, TiB₂-BN, 蒸发舟, 镀铝, 腐蚀

Abstract: The application of vacuum continuous evaporation plating technology in the composite current collector industry remains constrained primarily by the service life limitations of the core evaporation component (ceramic evaporation boats). This study systematically investigates the corrosion process of evaporation boats used for composite current collectors. Micro-zone compositional and structural evolutions during corrosion are characterized via the X-ray diffraction and scanning electron microscopy. Compositional analyses of distinct corroded regions on the evaporation boat surface reveal that the failure mechanism of TiB₂-BN ceramic evaporation boats involves: (1) depletion of surface BN constituents, with aluminum nitride (AlN) identified as the primary corrosion product; (2) Layered flaky exfoliation of TiB₂ particles, which accumulate at the boat edges. As a conductive phase, TiB₂ induces localized resistance reduction, thereby enhancing current density and heat accumulation, ultimately triggering aluminum melt splashing. These findings may provide critical insights into material degradation mechanisms for optimizing evaporation boat design in composite current collector manufacturing.

Key words: conductive ceramic, TiB₂-BN, evaporation boat, aluminum plating, corrosion

中图分类号: TB321

侯宇, 曹志强, 夏威. TiB₂-BN复相陶瓷腐蚀特征与界面失效机理探索^*[J]. 真空, 2026, 63(3): 23-27.

HOU Yu, CAO Zhiqiang, XIA Wei. Exploration of Corrosion Characteristics and Interface Failure Mechanism of TiB₂-BN Composite Ceramics[J]. VACUUM, 2026, 63(3): 23-27.

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TiB₂-BN复相陶瓷腐蚀特征与界面失效机理探索^*

Exploration of Corrosion Characteristics and Interface Failure Mechanism of TiB₂-BN Composite Ceramics

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