基于BLUE算法的超高真空密封装置故障检测*

doi:10.13385/j.cnki.vacuum.2026.02.15

摘要/Abstract

摘要： 针对超高真空密封装置泄漏故障检测中单次真空氦质谱检漏易受氦气分布不均干扰导致精度不足的问题,本文提出基于BLUE算法的超高真空密封装置故障检测方法。设计真空氦质谱检漏仪,对其最低可检漏率实施校准,运用校准后检漏仪测得超高真空密封装置的泄漏率,结合BLUE算法融合不同时刻下氦气不同分布浓度时检漏仪测得的装置泄漏率,得到最低方差的累积泄漏率检测结果,实现装置泄漏时的故障检测。该方法检测结果显示,在实验中的9个液氦杜瓦储罐中,C3与C6两个储罐的超高真空夹层漏率值分别为2.16×10^-12 Pa·m³/s与1.31×10^-12 Pa·m³/s,均不满足小于10^-12 Pa·m³/s的漏率要求,表明二者均存在泄漏故障,其中,C3的泄漏故障更为严重;该方法漏率检测结果的平均相对误差仅为0.054,且无明显波动,检测结果与实际情况相吻合。该方法显著提升了微小泄漏检测的精度与可靠性,为超高真空密封装置的性能评估与维护提供了技术支撑。

关键词: 线性无偏估计, 超高真空, 密封装置, 泄漏故障检测, 真空氦质谱

Abstract: Aiming at the problem that single vacuum helium mass spectrometry (HMS) leak detection of ultrahigh vacuum (UHV) sealing device is susceptible to the uneven helium distribution, this paper proposes a method based on the optimal linear unbiased estimation algorithm for the detection of UHV sealing device faults. A vacuum HMS leak detector is designed and calibrated for the lowest detectable leak rate. The leak rate of the UHV sealing device was measured by the calibrated leak detector, and the optimal linear unbiased estimation algorithm was combined to integrate the leak rates measured by the leak detector at different moments with different helium distribution concentrations, to get the cumulative leak rate results with the lowest variance, and then to realize the detection of device leakage faults. The results of this method showed that the leakage rates of the UHV interlayer of two tanks, C3 and C6, were 2.16×10^-12 and 1.31×10^-12 Pa·m³/s, respectively, which exceed the leakage rate limit of ≤10^-12 Pa·m³/s, indicating that there were leakage failures in both tanks, and the leakage failure of C3 was more serious; the average relative error of the leakage detection results was only 0.05%, and the leakage failure of C3 was more serious. The average relative error of the leakage rate detection result of this method was only 0.054, and there was no obvious fluctuation, and the detection result was consistent with the actual situation. This method significantly improves the precision and reliability of small leakage detection, and provides highly reliable technical support for the performance evaluation and maintenance of UHV sealing devices.

Key words: linear unbiased estimation, ultra-high vacuum, sealing device, leakage fault detection, vacuum helium mass spectrometry

中图分类号: TB774

刘婷, 刘成涛. 基于BLUE算法的超高真空密封装置故障检测^*[J]. 真空, 2026, 63(2): 104-110.

LIU Ting, LIU Chengtao. Fault Detection of Ultra-high Vacuum Sealing Device Based on Optimal Linear Unbiased Estimation Algorithm[J]. VACUUM, 2026, 63(2): 104-110.

参考文献

[1] 牛龙飞,尤辉,吕海兵,等.激光系统用密封圈除气对真空光学元件性能影响[J].强激光与粒子束,2023,35(6):32-36.
[2] 石龙,周建军,王东元,等.低真空隧道管片接缝密封垫气密性试验及力学模型[J].铁道学报,2024,46(8):180-186.
[3] WEHMANN C, KULKARNI A, DURN F, et al.Predicting temperature-dependent aging effects and permanent set of vacuum sealing systems in semiconductor manufacturing processes[J]. IEEE Transactions on Semiconductor Manufacturing: A Publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council,2024,37(3):260-270.
[4] 李海林,张呈杰.基于热室压铸机的高真空压铸工艺设计及试验研究[J].特种铸造及有色合金,2024,44(12):1724-1728.
[5] 闫国华,张泽恩,刘勇,等.介质压力对卡套式管路连接副密封性能的影响[J].计算机仿真,2023,40(5):123-129.
[6] 张仑,张晓明,马喜宏,等.基于两点磁梯度张量不变量的目标定位法[J].电子设计工程,2023,31(12):6-10,15.
[7] 王鹏毅,庄大杰,陈磊,等.容器泄漏检测中的橡胶圈氦渗透[J].辐射防护,2023,43(S1):78-83.
[8] 谢昱,高源慈,周蜀渝,等.空间站冷原子柜超高真空腔内射频天线的研制[J].中国激光,2023,50(5):177-183.
[9] 焦纪强,蒙峻,谢文君,等.超高真空环境下TC4钛合金和ZrO₂陶瓷的出气性能研究[J].材料导报,2025,39(1):285-289.
[10] 高佳奇,江游,戴新华,等.一种深海质谱用超高压膜进样装置的设计与测试[J].质谱学报,2023,44(3):333-340.
[11] 成永军,孙雯君,董猛,等.量子真空测量技术研究进展[J].科技导报,2025,43(12):65-79.
[12] 刘鹏,袁啸林,侯吉磊,等.真空检漏机器人目标识别技术研究[J].电子测量与仪器学报,2023,37(8):128-135.
[13] 李云恒,何绍栋,马龙,等.超大型航天遥感器评价系统漏孔高效定位方法研究[J].真空科学与技术学报,2023,43(6):494-503.
[14] 胡晓月,陈俊儒,胡庆生,等.一种高真空零部件放气率测试装置的研制[J].真空科学与技术学报,2024,44(6):477-487.
[15] 雷晓庆,邵奇,陈岚.氦质谱检测法考察定量压力气雾剂包装密封完整性[J].药物分析杂志,2024,44(2):298-306.
[16] 刘先,边少锋,翟国君,等.改进的Stein无偏风险估计的小波滤波算法[J].测绘科学,2024,49(12):158-166.
[17] ALDANA-LÓPEZ R, VALENCIA-VELASCO J, LONGORIA-GANDARA O, et al. Efficient Optimal Linear Estimation for CPM: An Information Fusion Approach[J]. IEEE internet of things journal,2024,11(5):8427-8439.
[18] Verma B D,Pratap R,Thakur M.Unbiased estimation of inner product via higher order count sketch[J].Information processing letters,2024,183(1):106407.
[19] Zhang Y K, Liu G M, Song X M.Unscented recursive three-step filter based unbiased minimum-variance estimation for a class of nonlinear systems[J].International Journal of Systems Science, 2025, 56(2):227-236.
[20] ELDER G.PRINCIPLES OF MASS SPECTROMETRY WITH HELIUM TRACER FOR LEAK TESTING[J]. Materials evaluation,2023,81(12):22-28.
[21] BAI G Y, LIAO X D, PAN R M, CHEN J L, CHANG J L.Optimal design of a high-sensitivity multi-gas leak detector[J].Vacuum, 2025, 238:114289.
[22] SWIFT S J, ŠPANĔL P, SIXTOVÁ N, et al. How to use ion-molecule reaction data previously obtained in helium at 300 K in the new generation of selected ion flow tube mass spectrometry instruments operating in nitrogen at 393 K[J]. Analytical chemistry,2023,95(29):11157-11163.
[23] GOSWAMI P, SUMANA P, SASI B K, et al.Rapid and precise determination of the 238Pu/239Pu isotope ratio using thermal ionization mass spectrometry[J]. Journal of Analytical Atomic Spectrometry,2024,39(2):500-507.
[24] 孟龙,张维科,李俊菀,等.发电厂凝汽器冷却管泄漏在线定位技术研究[J].热力发电,2025,54(1):162-170.
[25] YU X F, DOU R C, FENG Q.Study on in situ mass spectrometry leak detection technique of working fluid in spacecraft electric propulsion system[J]. Vacuum, 2024, 226:113292.
[26] 彭世亮,王卫良,吕俊复,等.超低负荷工况下汽轮机末级运行特性及其优化机制探索[J].热力发电, 2024, 53(6):65-78.
[27] 刘丹,郑宾,郭华玲,等.基于外差干涉的微振动测量技术研究[J].应用光学, 2014, 35(5):858-861.

Metrics

Viewed

Full text

Abstract

Cited

Shared

Discussed