真空 ›› 2019, Vol. 56 ›› Issue (6): 60-63.doi: 10.13385/j.cnki.vacuum.2019.06.11
丁孙安, 杨辉
DING Sun-an, YANG Hui
摘要: 进入纳米时代后,纳米材料与纳米器件的性能不只取决于块体材料的性质,而更主要是由材料的表、界面性质来决定。为了避免由于表面污染而造成的改变与损伤,薄膜材料通常需要放置于超高真空环境中。本文介绍了纳米真空互联大装置的必要性、功能,以及支持项目和取得的重要进展。
中图分类号:
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