关键词: AZO 薄膜, 表面形貌, 微纳结构, 靶电压, 电学性能, 雾度

Abstract: Micro -nano structured Al -doped ZnO thin films were deposited by DC -RF coupled magnetron sputtering system binding winding bar scraping coating on glass substrates at room temperature. The RF sputtering power ratio of basement AZO film was adjusted from 50% to 90% . The structure, surface morphology, optical and electrical properties of the micro -nano structured AZO films were investigated by X-ray diffractometer, scanning electronic microscope, Hall effect test system, ultravioletvisible spectrophotometer and WGW, respectively. The results indicate that the resistivity of the micro-nano structured AZO film is dominated by RF sputtering power ratio of the basement AZO film. The films deposited under RF sputtering power ratio of 80% exhibit the lowest resistivity of  5.32×10^-4 Ω·cm. The average optical haze is approximately 36.3% in the visible wavelength. With the increase of RF sputtering power ratio, the surface morphology, growth form and the particle size of the films change greatly. Meanwhile, the micro-nano structured AZO films show light trapping effect and excellent optical and electrical properties.

Key words: AZO thin films, surface morphology, micro-nano structure, target power, electrical property, haze