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VACUUM ›› 2023, Vol. 60 ›› Issue (4): 29-35.doi: 10.13385/j.cnki.vacuum.2023.04.06

• Measurement and Control • Previous Articles     Next Articles

Development of Compact Emission Guns for Charged Particles

GUO Fang-zhun, SHI Xiao-qian, WANG Run-cheng   

  1. School of Mechanical Engineering, Dalian Jiaotong University, Dalian 116028, China
  • Received:2022-02-03 Online:2023-07-25 Published:2023-07-26

Abstract: The basic principles, particle trajectories and structures of the compact emission guns for electrons and argon ions are introduced respectively. The typical electron guns are used for charge neutralization, pulse emission and high energy electron diffraction. The types of argon ion gun are usually classified to cold cathode, hot cathode and plasma sources. The compact emission guns are playing important roles in the development and application of scientific research, semiconductor industry, life sciences, defense and aerospace.

Key words: electron, ion, plasma, electromagnetic lens, electrostatic lens

CLC Number:  TL82

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